Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25 M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.
Electroless nickel plated q w e r t y u i o !0 !1 !2 !3 !4 !5 !
Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note
Base Mounted Plug-in: Single Unit VQC4000 Series How to Order Valves 0 VQC4 0 1 Plug-in 1 Thread type SV Nil Rc N NPT T NPTF F G SYJ Type of actuation 2-position single 3-position closed center SZ (A) 4 (B) 2 (A) 4 (B) 2 Port size 1 3 Nil Without sub-plate (For manifold) VF 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2-position double 3-position exhaust center 02 1/4 03 3/8 (A) 4 (B) 2 (A) 4
Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.
INFORMATION Pressure adjustment of water line Water Regulator Model/Specifications Model WR110--X224 WR110--X215 Port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/8, 1/4 Fluid *1 Water Ambient and fluid temperature 5 to 60C (No freezing) Proof pressure 1.72 MPa Maximum operating pressure 0.8 MPa Set pressure range 0.08 to 0.39 MPa 0.05 to 0.69 MPa Pressure gauge port size Rc1/8, 1/4 Rc1/8, 1/4, NPT1/
Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration
Other lengths available based on minimum order quantity TG-2 TG-1 SMC Tubing Accessories TK-1 Tube Cutter (Tubing 13mm or less) TK-2 Tube Cutter (Tubing 18mm or less) TK-3 Tube Cutter (Low Cost) TG-1 Tube Release Tool (4, 6mm tube) TG-2 Tube Release Tool (1/8 , 1/4 tube) TK-3 TK-1 SMC Offers a Rainbow of Standard color choices 33 TIUB 05 BU 20 TU 0425 BU Polyurethane Tubing Polyurethane Tubing
JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally
Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.
Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San
Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.
Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)
Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
Element Description Power supply connector 1 Unused. 1 Power input connector Supplies power for output devices.1 2 To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. Power LED Indicates the power supply status. 3 2 1: Refer to for the Wiring.