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Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

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Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

70pvpump

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. Operating Environment Maintenance Warning Warning 1.

High Vacuum Angle Valve

Refer to Maintenance Parts on page 6 for further details regarding quantity and type.

HRX-OM-Z015

EC01h 4 Perform (6) for 3rd. value (0h) and then, perform (5). C02Dh Calculation 5 Perform (6) for 4th value (0040h) and then, perform (5). ED01h 6 Perform (6) for 5th value (0h) and then, perform (5). C02Ch 7 Perform (6) for 6th value (0001h) and then, perform (5). 1D00h 8 Perform (6) for 7th value (0002h) and then, perform (5).

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

MHZ2/MHZJ2

4 60 6.3 10 MHZJ2-10S Normally open 6 130 24 16 MHZJ2-16S 10 255 28 20 MHZJ2-20S 14 465 45 25 MHZJ2-25S 4 12 60 10 MHZJ2-10C Normally closed Single acting type, normally closed 6 31 130 16 MHZJ2-16C 10 56 255 20 MHZJ2-20C 14 83 460 25 MHZJ2-25C Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Digital Flow Switches, Series PF2A, Series PF2W

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

EXxx-OMN0029CN

byte0 Bit No. 0 1 2 3 4 5 6 7 / byte1 Bit No. 0 1 2 Reserved 3 () 4 () 5 6 7 byte2 Bit No. 0 Reserved : : 7 Reserved byte3 Bit No. 1 0 1 1 2 2 2 3 4 SI 5 Reserved 6 Reserved 7 Reserved 1Bit0 1 ON 2Bit2 3 ON -63No.EX-OMN0029CN-D byte0 Bit No. 0 0 1 1 2 2 3 3 4 4 5 5 6 6 7 7 byte1 Bit No. 0 8 1 9 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved

CLA

(0 0(0) 0(4.5) 3(8) 6 9.5) D-G5 3(0) 3(0) 7(3.5) 10(6 128.5 D-KS ~ Hs 38 43.5 SO.5 59 69.5 A 0{2) 0(2) 1(4.5 4(8 6(9.5 D-F59W 3(0) 3(0) 7.5(3.5) 10.56 12. 5(8. 5) D-J59W :; ~s 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 57.5 24 Accessories Series eLA Dimensions Of Accessories I Type Single Knuckle Joint Y Type Double Knuckle Joint '!

reduces flow setting time

Model AS1ll1FS-M5l AS2ll1FS-01 AS2ll1FS-02 AS3ll1FS AS4ll1FS Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

100

6 !5 !1 !4 Component Parts No.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

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Typ. 1 5 16 H-6 11 T-6-L6-6 IM6-L6-6-L6 Page 3 Distributed by Power Aire, Inc. www.poweraire.com sales@poweraire.com Tube to Tube Fittings Distributed by Power Aire, Inc.

ASR

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area Flow direction symbols on body AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 4 Metric size JIS symbol 1/8", 5/32", 3/16" 1/4" Tube O.D.

MXW Series Long Stroke Slide Table

25 138 328 6 95 81 2 141 176 149 MXW8150 32 32 45 168 378 7 120 106 2 145 MXW Series Long Stroke Slide Table Dimensions MXW 12 Stroke: 50, 75 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 2.5 J 12 Scale: 30% 6.5 Width across flats 8 5H9 +0.03 depth 4.5 0 Operating port M5 x 0.8 Operation direction A 6-M4 x 0.7 thread depth 6 (Helisert) 6 (Plug : M-5P) 58 46 27 24 5 26

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.