ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

HRX-OM-Z015

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 5 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low tank fluid level 1 CH1 abnormal high circulating fluid temp. 2 Reservation

KB

KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 KBE1-04 KBE1-06 KBE2-06 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 KBE3-10 KBE3-12 KBE4-12 2 (P.2.1-77, 2.1-78) R1 KB 1 H S 12 Female connector elbow union: KBL Style With sealant (only male thread

Low Maintenance Filter Series FN1

Filter plate 2 Series FN1 Flow Characteristics (Initial Value) Test fluid: Potable water Liquid temperature: 17 to 20C (room temperature) Test method: Per P/A test method (sanitary test stand) Element length 250mm: FN111-10-S Element length 500mm: FN112-10-S .1 .1 .05 .05 FN111-10-S005 (5m) Pressure loss (MPa) Pressure loss (MPa) FN112-10-S005 (5m) FN111-10-S020 (20m) .01 .01 FN112-10-S020

Pneumatic Transfer System Series MF

H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541 to 556 595 to 618 15 32 15 32 15 32 558 to 573 685 to 708 518 to 533 558 to 581

VXZ

pressure differential (MPa) Av x 10 m Cv converted Max system pressure (MPa) Weight (g) PAX Water, Oil, Steam 2 -6 VXZ2362-10 0 0.7 0.6 0.7 0.6 0.7 0.6 290 12 215 1.5 1550 PB Note) Values for the grommet type.

VQ

DXT170-75-1) VS Note) Make sure the locking style manual override is unlocked before use.

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Process Valve

table below G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Micro-Mist Separator with Prefilter Series AMH

37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225 AMH450 232 1 AMH550 3/4 1 259 AMH650 1 1 1/2 311 5 SeriesAMH (mm) Accessory AMH850 0: With auto drain (N.O. type) For AMH850 a: 3/88 female thread Optional Specification LL 0 T: With element service indicator 75 .

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Rotary Table

16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Process Pump

Fluoropolymer Needle Valve Series LVN Specifications LVN20 LVN30 LVN40 Model Orifice diameter 4.4 4, 6 1/8", 3/16", 1/4" Metric Inch 10 10, 12 3/8", 1/2" 8 6, 8, 10 1/4", 3/8" Tube size Refer to Best Pneumatics No. 7 for further details.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Specifications Series PSE200A PSE533 PSE543 PSE563 PSE573 PSE530 PSE540 PSE560 PSE570 Applicable SMC pressure sensor PSE550 PSE531 PSE541 PSE561 PSE532 PSE564 PSE574 PSE575 PSE576 PSE577 Rated pressure range 0 to 2 kPa 0 to 101 kPa 100 to 100 kPa 0 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 2 MPa 0 to 5 MPa 0 to 10 MPa Display/Set pressure range 0.2 to 2.1 kPa 10 to 105 kPa 105 to 105 kPa 10