1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 J Drain guide B female thread R IN-OUT reversal direction Symbol Description Bracket T Element service indicator Nil B N.C. auto-drain C 1 Standard 11 2 Standard N.O. auto-drain D Note) Refer to How to Order Bowl Assembly on page 1420-59.
The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.
Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.250 words MAX.500 byte Output MIN. 1 word MIN. 2 byte MAX.248 words MAX.496 byte When configuration assembly fundtion is not used: Set to "0".
LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.
D-Y7NW(V) Auto Switch Weight Table DC (+) Brown [Red] Unit: g Main switch circuit OUT Black [White] D-Y7BW D-Y7PW Model D-Y7NW 11 11 11 Lead wire length 0.5m 54 54 54 Lead wire length 3m DC () Blue [Black] Auto Switch Dimensions D-Y7PW(V) D-Y7W DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-Y7BW(V) OUT (+) Brown [Red] Main switch circuit D-Y7WV OUT () Blue [
Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Station L1 L2 L1 L2 Port size M5 1/
Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.
) (L4) (L5) 2.9-11 Series VQ100 How to Order Manifold How to Order Manifold Assembly Suffix valve and option numbers for the manifold base No.
The installation torque is 0.3 to 0.5 Nm. 14-11-15
Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.
Release valve 9 stations Release valve 23 Supply valve 6 5 Supply valve 11 10 stations Release valve 10 stations 24 Release valve 4 3 12 Supply valve Supply valve 25 11 stations Release valve 11 stations Release valve 2 1 13 Supply valve Supply valve 12 stations Release valve 12 stations Release valve COM. 25 Triangle mark indicator position COM. 26 Positive common specification Positive
3 H Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V r Lead [mm] A Servo motor (24 VDC) V V LECA6 Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8
SW screen TYPE Contact input signal 2 operation D.IN2 No.11 Setting input operation of contact input signal 2.
Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)
) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) With low load shock absorber + Adjusting bolts MY1W Bore size Stroke L TT h h E F EA h EB W F Stroke adjusting unit S (Shock absorber stroke) T MY1W16, 20 F MY1W50, 63 Shock absorber EC EY h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) S
Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc
For detailed selection procedures, refer to pages 8-11-12 to 8-11-13. 8-12-7 8 Series MY1W Maximum Allowable Moment/Maximum Load Weight Maximum Allowable Moment: MY1MW MY1MW/M2 MY1MW/M3 MY1MW/M1 200 40 50 20 100 30 10 20 50 40 5 4 30 10 3 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 MY1MW63 20 MY1MW63 MY1MW63 MY1MW63 2 MY1MW50 MY1MW50 MY1MW50 Moment (Nm) Moment (Nm) Moment (Nm) MY1MW50 MY1MW50
Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.
LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18
Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.