Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

SYJA3000

) 2-P1.8 2-M3 X 0.5 (Pilot port) A B 11 1.5 (Mounting holes) 2-3.2 17.5 18.5 A B (Non-locking) Manual override (Non-locking) Manual override 14 36 18.5 21 41.6 13.5 15 41.6 28.5 R2 P R1 21 R P R 13 11 0.5 10 5 5 1 (Bleed port) 210 10 7 7 1 (Bleed port) 228 5-M3 X 0.5 (Piping port) 5-M5 X 0.8 (Piping port) 3 position closed center/exhaust center/pressure center: SYJA3 20-M3(-F) 3 position

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13

LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Multi-Axis Step Motor Controller

(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

LJ1H

MSM021P1A Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting

VQ7-6/7-8

Release valve spacer AXT502-17A 1 1' 5 3 11 Series VQ7-6 Double check spacer Double check spacer with residual pressure release valve VV71-FPG VV71-FPGR By combining a 3 position exhaust center valve with a double check spacer, an intermediate stopping position of a cylinder can be held for an extended period.

Rotary Gripper Series MRHQ

closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides) 10 3-3H9 long groove depth 3 + 0.025

E-P HYREG ® Series VY1 1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

Compact Cylinder

Moving Parts: With Magnet for Auto Switch [g] 100 Allowable lateral load at rod end [N] 80 Bore size [mm] Cylinder stroke [mm] 63 5 10 15 20 25 30 35 40 45 50 50 40 32 12 6 7 8 9 10 11 10.0 16 7 8 9 10 11 12 20 16 17 19 21 23 25 27 29 31 33 25 25 25 28 31 34 37 40 43 46 49 53 20 32 43 48 52 57 61 66 70 75 79 83 16 40 69 75 81 87 93 99 105 111 117 123 1.0 12 50 127 137 147 157 167 177 187

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

id_idw_and_ida_series_air_dyers

11 11 11 11 11 11 11 Optional dew points . 100F (70C) Standard pressure dew point . 40F (40C) Maximum inlet temperature . 122F (50C) Minimum inlet temperature . 35F (1.5C) Compact Heatless Air Dryer Series IDW Solenoid valve services kit 20 22 25 32 42 42 57.5 57.5 Optional Extras Maximum working pressure . 232psig Foot mounting bracket 12DVC electric control Wall mounting bracket Minimum

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB