Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Nozzle Diameter: ø1.5mm, Vacuum Pressure: -48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A, SUP: One-touch Fitting ø5/16", VAC: One-touch Fitting ø3/8", EXH: One-touch Fitting ø3/8", Accessories: -

Type: Rail, Type: DIN Rail for SV1000 / 2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 235.5 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Rail, Type: DIN Rail for SV3000 / 4000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: -, Specification: -, Thread standard: -, Dimension: Length: 233.5 mm, Applicable valve: -, Pressure reduction port: -, Option: -

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: S (-90 kPa), SUP: 09 (One-touch Fitting ø5/16"), VAC: 11 (One-touch Fitting ø3/8"), EXH: 11 (One-touch Fitting ø3/8")

Nozzle Diameter: 15 (ø1.5mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 09 (One-touch Fitting ø5/16"), VAC: 11 (One-touch Fitting ø3/8"), EXH: 11 (One-touch Fitting ø3/8")

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: S (-90 kPa), SUP: 09 (One-touch Fitting ø5/16"), VAC: 11 (One-touch Fitting ø3/8"), EXH: 11 (One-touch Fitting ø3/8")

Nozzle Diameter: 13 (ø1.3mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: 09 (One-touch Fitting ø5/16"), VAC: 11 (One-touch Fitting ø3/8"), EXH: 11 (One-touch Fitting ø3/8")

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -48, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 3/8 (Ø9.53), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 5/16 (Ø7.94), Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 84, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 3/8 (Ø9.53), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 5/16 (Ø7.94), Application: Manifolds, Operating Pressure Range(MPa): 0.1～0.6

Main Body Shape: Pipe Type, Additional Function: -, Ultimate Vacuum(kPa): -90, Air Consumption Flow Rate(l/min): 113, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: 3/8 (Ø9.53), Air Supply Port Connecting Shape: One-Touch Couplings, Air Supply Port One-Touch Fitting Size: 5/16 (Ø7.94), Application: Manifolds, Operating Pressure Range(MPa): 0.1～

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 11 11 Vacuum suction port M5 x 0.8 N x M5 x 0.8 thread depth 6 Note 1) Note 2) Extension end adjuster 36.5 (Extension end adjuster) 5.5 11 5H9 ( ) depth 5 +0.030 0 Retraction end adjuster 6 12.5 (Extension end adjuster) 24.5 28 58 1 24 3.5 49 29 24.5 14.5 5H9 ( ) depth 5 +0.030 0 F 6.5 4 x M5 x 0.8 thread depth 7 2 N 1 x F 14 41 3 x M6 x 1 thread

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300 13 13 102 1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 10-4-14 15 Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

LECA6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

LECP6_C

W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.