Series AS-FM/AS-M/ASD-FM

12 13 14 15 16 17 18 19 20 21 Note No.

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

MGQ

13.5 15.5 19 25 25 29 35.5 45.5 55.5 15 21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75

MVGQ

Note 2) For the specifying way of ordering numbers for the solenoid valve with adapter assembly, refer to page 10-16-4. 10-16-19 20 Series MVGQ Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range Bore size (mm) Auto switch model 16 100 12 20 25 32 40 50 63 80 D-Z7/Z8 8.5 14 7.5 9.5 9.5 11 11 11 13 13 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 11.5 5 6 6.5 8.5 8.5 9 10

ZX

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned this catalog, and refer to page 13-1-5.

CRB1/Size: 10, 15, 20, 30

CRBU Basic (Side port) CRB1FW Basic (Axial direction port) CRB1FW W/ angle adjuster CRB1FWU W/ auto switch CDRB1FW W/ angle adjuster and auto switch CDRB1FWU Size Size Size Size Size Angle , #11 (#1+#11) , #12 (#3+#12) , #13 (#5+#13) , #14 (#7+#14) , #15 (#9+#15) S SCRB SE SCRB S SCRB S SCRB S SCRB Size Size Size Size Size Angle Angle CRA1 Angle Angle CRQ Ass'y Part Number: P211070

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN 1 2 3 4 5 6 7 8 9 M VVQ1000-90-6 85.5 35 VVQ1000-90-7 98 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-10 135.5 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 6.5 11 38 3 6.5 11 38 1/4 VVQ1000

S070

6 52 58 7 59.2 65.2 8 66.4 72.4 9 73.6 79.6 10 80.8 86.8 11 88 94 13 102.4 108.4 14 109.6 115.6 15 116.8 122.8 16 124 130 17 131.2 137.2 18 138.4 144.4 20 152.8 158.8 L1 L2 4-11-11 12 3 Port Solenoid Valve Series S070/Body Ported Manifold Stacking Type Specifications How to Order Manifold How to Order Manifold Assembly Enter the part numbers of the valves and options to be mounted below

ML2B

12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake:

Digital Gap Checker

With 2 tapping screws (3 x 8) 16 ISA3 Series Dimensions ISA3-mm (Bracket mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38 (33.3) 4 77 15 66 H 25.6 11 5.5 When centralized lead wire is used. 17 Pin no.

ML2B

12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 12 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake:

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Refer to pages 15 and 16 for detailed selection procedures.

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Description Side cover Bearing retainer Sensor rail Bumper End cover A End cover B Inner cover Motor cover Auto switch Magnet Brake Material Note 50W/100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy IIR PC PC PC PC Rare earth magnet 12 13 14 15 16 17 18 19 20 21 22

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

IDX-OM-W017

IDFA Series 10-3 10 2 IDX-OM-W017 11 R 11 R R (GFCI) GFCI1GFCI11-2 11-1 1. 2. 3. 4. GFCI 5. 6. 7. 11-2 IDFA4E/6E/8E/11E-23-R 5A 30mA IDFA15E1-23-R 10A 30mA 11-3 1) 2) 3) IDFA Series 11-1 11 1 IDX-OM-W017 11 R 9.5mm L N 6.5mm 11-4 () () 11-5 1-1 IDFA Series 11-4 11 2 IDX-OM-W017 12 T 12 T T 12-2, 12-3 12-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3