AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

IDX-OM-W095

. 13-1 13.1 . 13-1 IDFC60/70/80/90 Series IDX-OM-W095 1 1.1 () 6.2 1.1.1 3 IDFC60/70/80/90 Series 1-1 IDX-OM-W095 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDFC60/70/80/90 Series 1-2 IDX-OM-W095 1.2.4 IDFC60/70/80/90 Series 1-3 IDX-OM-W095 1.2.5 SERIAL No.

PSxx-OMT0001CN

13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMT0001CN-E 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -23No.PS-OMT0001CN-E

VFS4000-OMY0001

No.VFS4000-OMY0001 / / VFS4000 . 1,2 1 . 3,4 2 1) . 5 2) . 6 3 . 7 4 . 7 5 1) DIN . 8 2) . 9 3) . 912 6 . 12 7 . 12 8 . 13 9 . 13 10 . 13 11 . 14 . 15 . 16 No.VFS4000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical

EXxx-OMN0027CN

No.EX-OMN0027CN-D PROFIBUS DP SI // EX600-SPRA EX600-ED 2 8 9 11 13 13 15 SI 16 16 17 17 18 LED 22 24 25 26 27 29 29 31 32 42 43 52 52 63 GSD 63 63 SIEMENS PLC S7 64 67 69 70 78 -1No.EX-OMN0027CN-D [][][] (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

α PneuAlpha HARDWARE MANUAL

Wiring . 13 6. How to Use PneuAlpha Series Controllers Getting Started. 21 5.

Pressure Control Equipment

capacity of auto feed tank. 14-13-2

SYJA3000

position single: SYJA3120-M3(-F) 2 position single: SYJA3140-M5 10 10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 3.2 210 SlA 22 4 (Mounting hole) Manual override M3 X 0.5 (Pilot port) M3 X 0.5 (Pilot port) (Non-locking) A B 11 17.5 VlA 1 (Bleed port) 1.5 A B 1.5 1.5 5-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13

VKF300

2 54 46 32 3 73 65 51 4 92 84 70 5 111 103 89 6 130 122 108 7 149 141 127 8 168 160 146 9 187 179 165 10 206 198 184 11 225 217 203 12 244 236 222 13 263 255 241 14 282 274 260 15 301 293 279 16 320 312 298 17 339 331 317 18 358 350 336 19 377 369 355 20 396 388 374 L1 L2 L3 Common SUP, Individual EXH/Top Ported Type 21 Manifold Grommet: G DIN terminal: D Manual override (non-locking) 2-

2/3 Port Valve

Connect a speed controller (Series AS etc.) to A port (cast in body A)of VNA11 (in order to protect the speed control valve from surges when cylinder operation is suspended, thus improving stopping accuracy) Condition 0.49MPa Supply Pressure Hydraulic fluid Load Piping length ISO VG32 No load 1m VNA111A CCVSO2 3/8B(9 mm) VNA111A CCVSO2 Piping dia. 1/ 2B(13 mm) VNA311A 3/4B(19 mm) VNA411A

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Tightening torque: 0.18 to 0.25Nm 1.13-5 Series VQD1000 Dimensions L plug connector: VQD1121l-lL-M5 M plug connector: VQD1121l-lM-M5 Lead wire length: 300mm 2-M5 X 0.8 (A, B port) Direct manual override Light 0.5 0.5 4 11 2 (11) 5.5 15 0.6 0.6 5.3 5.3 13 34 33 29 25.5 6 3 21.5 4 2-3.5 Mounting hole 28.5 49 50.5 2-M5 X 0.7 (P, R port) 3 1 (R) (P) 7.4 3 (13) 1.13-6 Series VQD1000 Dimenisons

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Wire color 2 1 1 2 3 4 Brown Width across flats 13 16.3 14.8 White Blue Black 4 3 M12 SPEEDCON Plug connector pin assignment A-coded (Normal key) Wiring #3 PCA-1557756 Field-wireable connector (M12) 55 Terminal no.

PF2D

How to Order Dimensions LQ1 fitting size: 3 1S PF2D504 S 11 (186) 70 58 1 27.5 9.53 With LQ1 fitting Size OUT side 3 4 (With reducer) 3 4 (With reducer) IN side 3 3 4 (With reducer) 4 (With reducer) Model 11 1113 1311 13 LQ1 fitting size: 4 58 1 33 9.53 LQ1 fitting size: 4 13 1S PF2D520 S (186) 70 58 1 33 With LQ1 fitting 12.7 Size OUT side 4 5 (With reducer) 4 5 (With reducer) Model 13

7.4

AN110-01 (BC sintered body) AN10-01 (Resin) 34 23 11 13 756 Options S0700 Series Body Ported Base Mounted Double check block (Separated) VQ1000-FPG-mm Cylinder side pressure (P2) SJ It is used on the outlet side piping to keep the cylinder in the intermediate position for long periods of time.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting

Compact Hydraulic Cylinder

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Suction flow rate l/min (ANR) 6 10 15 20/25 32 2 5 10 15 20 0.1MPa 0.05MPa 0.15MPa 10 to 60C (With no condensation) 30 to 400mm/s 0 to 5mm compared to the standard stroke Ball bushing bearing/Slide bearing Bearing type 10-/11-/12-: Fluorine grease 21-/22-: Lithium soap base grease 10-/12-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M8 x 1.25 40 41 28 43 20.5 32 13 ZPT50HB-A14 -B10 50 52 36 54 24 35.5 65.5 16.5 M10 x 1.5 ZPT50HB-B 8 ZU M8 x 1.25 50 52 36 54 24 35.5 16.5 -B10 M10 x 1.5 ZL ZY ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZF M16 x 1.5 ZP (Rc, NPT, NPTF) 8 1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7

Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13