2–4

5 15 10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 25 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 25 15 Besides the models listed in How to Order, the following auto switches are applicable.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

5 !6 !7 !8 !

energy saving effect

A 14 17 21 25 Rated power consumption Note 5) kW (kVA) 4.2 (4.7) 5.3 (5.8) 6.6 (7.0) 8.0 (8.4) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 61 60 61 Waterproof specification IPX4 Accessories Alarm code list stickers 2 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Order the seal kit, based on each bore size. 8-29-5 6 Series CXS Construction: Ball Bushing Bearing CXSL6 y!6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

18 3.75 4.03 3.75 4.03 0.86 0.38 0.624 1/4-28 0.50 0.95 0.62 0.250 MB1 088 (7/8") 0.34 0.75 0.250 0.75 5/8-18 0.50 5/8-18 3.31 3.59 3.56 3.84 0.93 0.38 0.624 1/4-28 0.50 0.95 0.62 0.250 106 (1 1/16") 0.12 0.34 0.88 0.250 0.75 5/8-18 0.25 0.50 5/8-18 3.84 4.12 3.97 4.25 1.12 0.38 0.624 5/16-24 0.62 1.17 0.62 0.312 CA2 125 (1 1/4") 0.25 0.41 1.06 0.250 0.75 3/4-16 0.38 0.75 5/8-18 4.47 4.87

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 3) Note 4) Note 4) Port size Note 1) 1 station weight (g) 5 stations

Secondary Batteries

(P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

Electromagnetic Digital Flow Switch

(Interval of 2 or 5 minutes can be selected.) If the 5 minutes interval is selected, the life of the memory element (electronic parts) is limited to 1 million times. (If energized for 24 hours, life is calculated as 5 minutes x 1 million = 5 million minutes = about 9.5 years.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

Cylinder with Lock Series CLS

Max. load current or current range (mA) None 5 to 50 5 to 50 5 to 25 5 to 12.5 20 50 25 12.5 30 D-A53 PLC 24VDC 24VDC 100VAC 200VAC 4 to 8VDC 24VAC/DC or less 100VAC 200VAC Max. 24VDC D-A54 Relay, PLC None IC circuit D-A56 None D-A64 Relay, PLC D-A67 None None (2 color indication) IC circuit, PLC D-A59W 5 to 40 24VDC Relay, PLC 5 to 50 5 to 50 5 to 25 5 to 12.5 50 40 20 5 to 40 5

Wireless System

Description 73.6 1 24 V (for output) 56.6 2 1 2 0 V (for output) 3 24 V (for control/input) 5 30.2 4 0 V (for control/input) 4 3 13.2 5 FE EX600-ED3 42.5 5.5 26 20.5 8 106 90 30.35 Power supply connector PWR: 7/8 inch 5-pin plug 56.6 Configuration Pin no.

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

Title not found

s1 be a 3 pos lon vave assembly Individual SUP/EXH spacer Series SVl000 sv1000 Spacer type Port s ze for Ser es SV2000/3000/4000 sx3000-22 I (M2 x 39 5) sv2000-21-6 ([I3 x 46) sv3000 21-3 (N44 x 5s) sY7000-r 1-r 1 sv2000 sv3000 sY5000 1r 15 sY9000-11-2 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported flow Cv p c h (mm) I\Ietal seal vQz10m Up to o5L) voz2m0 Up to o80 Up 10 ol00 voz300o

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

P) 5(EA) 3(EB) 1(P) JIS symbol 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) JIS symbol 3 position closed center 3 position closed center/exhaust center/pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position exhaust center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 3 position pressure center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

IDX-OM-W038

IDH*6 1 2 AME-EL350 3 AME-EL250 4 O 5 4.2 46 IDH Series I D XO M W 038 5 5 5. 1 O FF O FFO N 2-3 ( 1 /) ( ) 3-1, 3-2 -5+10% 600m m 2-3 ( 1 /) 4-4 IDH Series 51 5. 1 I D XO M W 038 5 4-1 2 3-1 4-1 6-1 N .