Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 50mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Metal Stopper, Extension End, Functional Option: Standard Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 5m, Number: -

Specification: Copper, Fluorine and Silicon-free + Low Particle Generation, Vacuum Suction Type, Bore: 12mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 100mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: -

Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: KRT (K+R+T)

Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: AR (A+R)

VK300

Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions: Base Mounted Grommet: VK334-G-01 DIN terminal: VK334-D-01 (Mounting hole) 2 x 4.3 4 26 A 25 22

Steam Valve

Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22

Angle Seat Valve /

Measurement conditions: Fluid temperature 183C, Ambient temperature 60C Temperature of the fitting port of the insulated adapter: Mounted 70C Not mounted 130C Connection thread Proper tightening torque [Nm] M5 (Insulated adapter) 0.4 to 0.6 Rc1/8 7 to 9 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 4.

Air Suction Filter

ZFA200 Description Gasket Element AL-204H AL-205H EJ001H-030N EJ101H-030N Element size Element size (mm) 43 x 42 x 12 43 x 40 x 22 Element Replacement 1) Stop operation and reduce the filter's internal pressure to atmosphere. Element 2) Loosen the stop pin and open the cover. 3) Hold the knob on the top of the element and take it out.

ZSE5/ISE5

Bracket 2S-22-D With four M3 tappings Digital pressure switch Ser,"es ZSE5 115E5 for general purpose fluid 1 ' How to Order Piping Piping '---r--'I Vacuum pressure switch Positive pressure switch ZSESB L ISESB L Switch specifications t~'1'~"o", 26 Anal 3-wire L Grommct:3m specifications specifications 02 Direct plpmg R(PT)1 /4 T2 Direct pin NPTF 1/4 27 2 out ut NPN 4-wire 67 20ul ul {PNP

Air Tank Series AT 1

Accessory (Option) Tank capacity ID D With auto-drain F Companion flange Port size Capacity ( l ) 100 200 400 500 700 1000 1500 Applicable compressor (kW) 5.5 Symbol AMG 6C 04 Rc 06 14 20 30 1 2 Rc 3 4 Rc 1 1 2 2B flange 3B flange 40 4B flange AT6C AT11C AT22C/37C AT55C/75C AT125C AT150C/220C 11C 11 22C 22 AFF 37C 37 55C 55 AM 75C 75 125C 125 2000 150C 150 3000 220C 220 Misc. 14-16-1 2 Series

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: ARV (A+R+V)

Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: AR (A+R)

Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: SV (S + V)

Series 10-, 21- AF-A Air Filter

23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

HRX-OM-Z015

(Alarm flag 2) 0x0 0,0,0,0 0x00,0x00 Information of 003Dh (Alarm flag 3) 0x0 0,0,0,0 0x00,0x00 Information of 003Eh (Alarm flag 4) 0x0 0,0,0,0 0x00,0x00 Information of 003Fh (Alarm flag 5) 0x0 0,0,0,0 0x00,0x00 Checksum ASCII:LRC RTU:CRC 1,3 0x93,0xF1 HRLE Series 3.11 Explanation of function codes 3-11 HRX-OM-Z015 Chapter 3 Serial communication Trailer CR/LF None Total quantity of byte 75