Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Particle generation has been reduced to 1/20 compared to series 12-CY1B (previous SMC product) even without vacuum suction. MX Shock-free A sine cushion is used at the end of the stroke. Smooth acceleration and deceleration are possible at 0.5 G or less.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

While the test function operates at manual mode, only the output is valid. 53

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

Cap AXT103-4 XT021-12 XT103-5 XT010-20 XT010-21 XT041-1 Resin Resin Bushing Spring Rubber plug for wire Round head combination screw Plug for cover r t y u i o Gasket XT013-31-2 NBR NXT030-8 !

5 Port Solenoid Valve Series SV

II Air Cylinder Drive Systems Total Stroke Time and Speed at the End Series SV Series SV1000 Applicable bore size: 20, 25, 32, 40 Applicable related components Total stroke time s Solenoid valve Tubing Speed controller Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F

Digital pressure switch for energy-saving control ejector

mode 20 Default setting 20 F0 Unit selection function 23 F1 OUT1 24 F2 OUT2 26 F3 Response time 28 F4 Auto-preset 29 F6 Fine adjustment of display value 31 F11 Display resolution 32 F80 Power saving mode 33 F81 Security code 34 F90 Setting of all functions 35 F96 Check of suction command signal 37 F98 Check of output 38 F99 Reset to the default setting 40 Other Settings 41 How to stop energy-saving

PSE530/200

Insert each lead wire into the corresponding connector number by following the chart provided below. 20 mm or more Connector no.

ISG

26 23 20 26 30 29 10 30 29 10 ISA2 77 77 99 99 IS 126 126 R 3/8 R 3/8 ZSM PF2 IF Dripproof type ISG210 to 291-030 (Without hysteresis scale plate) ISG210 to 231-031 (With hysteresis scale plate) Data Hysteresis adjusting bolt Hysteresis adjusting bolt Setting pressure adjusting bolt Setting pressure adjusting bolt 75 18 8.5 110 56 175 110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20 26

VND

60 74 26.5 30 37 121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 LVA LVH LVD Port size Flange: 32F, 40F, 50F LVQ J (Valve open) LQ Indicator (Option) LVN Pilot port TI/ TIL PA PAX PB 4 x 2-18 mounting hole Applicable flange Pilot port Rc A B C D E F G H J Model 8 10 12 50 40 32 1 8 1 4 1 4 VND50D-32F VND60D-40F VND70D-50F 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Rolling bearing CRB2 FS (a) FS (b) CRBU2 Fr CRB1 MSU CRJ Backlash reduced Backlash reduced CRA1 CRJ05 CRJ1 Model Even with a single rack design, the use of a special construction minimizes backlash. 25 30 Fr Allowable load (N) CRQ2 20 25 FS (a) MSQ 20 25 FS (b) Pinion gear 5 6 Output shaft size (mm) Stopping the pinion gear by having it strike against the flat surface of the piston eliminates

Process Valve

size Rc Air operated External pilot solenoid b C [dm3/(bar.sec)] Conversion Cv 1.0 1.2 1.3 2.9 4.5 3.1 5.8 5.8 11 Kv 0.9 1.0 1.1 2.5 3.9 2.7 5.0 5.0 9.6 Cv 0.80 1.0 1.1 2.6 4.0 2.6 4.8 5.4 7.4 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A 1 8 1 4 3.3 4.6 4.7 9.6 17 9.6 19 18 35 0.29 0.17 0.18 0.40 0.32 0.40 0.24 0.42 0.13 0.3 0.4 7 3 8 11 15 11 15 14 20

Steam Valve

4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 638 A VND Series Specific Product Precautions Be sure to read this before handling the products.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRJ1 CRJ05 Model Even with a single rack design, the use of a special construction minimizes backlash. 30 25 Fr Allowable load (N) CRQ2 25 20 FS (a) MSQ 25 20 FS (b) Pinion gear 6 5 Output shaft size (mm) Stopping the pinion gear by having it strike

44

24 27 38 41 51 37 41 50 41 45 57 42 43 53 72 78 KA 4 2.5 1.8 1.6 10 8 13.5 5 4 3 KQG2 2.3 2.6 Applicable tubing L1 M 6 4 6 10 10 15 5.8 3.3 KG H1 12 d 8 6 KFG2 KFG2 5.3 12 14 17.4 6.6 16 22.2 A L2 23 H2 MS 25.6 10 7.5 6.8 26 Connection thread 27.5 15 17 20.9 7.6 KKA 27 25.6 10 8 7.3 30 KP 27.5 27 25.6 12 9 8 LQ 35 27.5 16 17 23.5 8.5 34 MQR 25.6 12 10 9 44 27.5 31 32.9 T 16 13 79 12 21 22

VP300/500/700

Flow passage Porting specifications A Side R P Common Common 3 Side Individual Special specifications Symbol Note Nil Standard 1 Type 41 Type 42 Common R Common external pilot Stations 02 2 stations 20 20 stations Note) Instruct by specifying the valves and blanking plate to be mounted on the manifold along with the manifold base model no.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Electro-Pneumatic Valve NVEP/NVEF Series

SOLENOID SPECIFICATIONS Adder Number 0 1 Required Amplifier VEA1 30, VEA131 vEA 250, 251 ,252 Control Range 0-750mA 0 1 A Coil Resistance 26]2 (68"F (20"C) ) 1312 (68"F (20'C)) PorYer Consumotion 15W Max. Current (68"F (20"C) ) 13W Max. Current (68"F (20'C)) Insulation Class H Max. TempeEture Rise 284'F (140"C) at Full Current Elec-trical Connection DIN Connector (h" PF) NVEF.

Silencers NAN, NAMC Series Compact Mufflers, Exhaust Cleaners

2 M4f.7 optr-8 1.57 (40) 276 o0) 0.13 (x2l 0.79 (m) 0.79 \20) 6.95 076.5) 'Remove drain cock to obtain 1/4 pipe lhread (220 only) Typical Applications r t l -i-E-:I I I ; | | | ' \t/ H

IDX-OM-Y002

Discharge the cleaning fluid and rinse the cooling tower with water for 20 minutes or longer to get rid of the cleaning agent. Hose Circulation pump Water amount 20 to 30 L/min. Pressure 0.1 to 0.3MPa Tank (Barrel) c Procedure when the cooling tower is used. 1. Inject the detergent into the cooling tower and clean the tower for specified period of time. 2.

PSxx-OMV0008CN

-2No.PS-OMV0008CN-E / *3) 1 1.5 3) 1 1 () [] -3No.PS-OMV0008CN-E () () () () -4No.PS-OMV0008CN-E () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) (ISE7G-T-ZS-48-A) N G -5No.PS-OMV0008CN-E Al2O3(96)C3604+FKM () O 1 /min 16MPa () * FG (35 N () ,() *() 6 33 -6No.PS-OMV0008CN-E () () 20 m DC(-)() * () () CE -5~70-5~50(5 ) (FKM) Al2O3()C3604()( ) -7No.PS-OMV0008CN-E

NAIV

NAN200,400 NAN500 -900 4.21 11071 NAN120-X200 Port size (NPT) M5 (NOM 10-32) Noise reduction lvax. operating pressure I 45 PS(10.2kg7c.rf) 40140.F (s -60.C) Operating temprature range Effective orifice mm2 (Cv) 5 (0.27) 20 0.1) .12 (3.3) \4/eight oz (g) 0.69 (17) Dimensions In.