/

External Pilot Solenoid Type (Conduit terminal) A B C D E F G H I J K L M N O Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154

LEC-OM02904

3-20 3.6 3-23 3.7 3-24 3.7.1 3-24 3.7.2 3-25 3.7.3 3-27 3.8 3-28 3.9 SSCNET 3-29 3.10 3-31 3.10.1 3-31 3.10.2 3-32 3.11 3-33 3.11.1 3-33 3.11.2 3-34 3.11.3 (LE--) 3-37 3.12 3-38 3.13 3-39 1 - 4 41 4-12 4.1 42 4.1.1 42 4.1.2 43 4.1.3 44 4.2 45 4.3 46 4.4 48 4.5 48 TM 49 4.5.1 MR Configurator2 4.5.2 4-11 5 515-35 5.1 (No.PA) 52 5.1.1 53

AC Servo Motor Driver (SSCNET Type)

Parameter setting (PLC side) . 53 7.1 SSCNET Setting .53 7.2 Movement amount per pulse .54 7.3 Stroke limit .55 7.4 Operating conditions .56 8. Home position return (PLC) . 57 8.1 Returning to home position .57 9. Positioning operation (PLC) . 58 9.1 Setting of Operation data .58 9.2 Movement MOD .62 10.

AC Servo Motor Driver (SSCNET /H Type)

Save the displayed waveform screen (print screen). -53- 6.10 Display All Monitor List The method how to obtain the electric actuator condition is described with the display all function of the setup software. Click Monitor Display All of the setup software to display Display All window. The condition of each item is displayed.

OMU0023

S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Dimensions HF2-BFA, HF2-BFB, HF2-BFD HF2-BFC Model P A B C D E G J HF2-BFA30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFB30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFC30 1/4, 3/8 53 126.4 21.5 26.5 30 35 26.5 HF2-BFD30 1/4, 3/8 53 151.1 21.5 26.5 30 35 26.5 HF2-BFA40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFB40 1/4, 3/8, 1/2 70 180.9 25.5 35.5 38.4 40 35.5 HF2-BFC40 1/4, 3

Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWM20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWM30-D 1/4, 3/8 1/8 53

Ｍ icro Mist Separator Regulator

: Max5 (Pressure gauge port size) (Port size) maintenance Clearance for Dimensions Model Optional specifications Round ty pe pressure gauge (Semi-standard: Z) Round ty pe pressure gauge (With color zone) Standard specifications Round type pressure gauge P1 P2 A B C D E F G J K J J J AWD20-D 1/8, 1/4 1/8 40 100.6 71.8 21 M281 45 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AWD30-D 1/4, 3/8 1/8 53

Digital Flow Switches

SET SET button Use this button to set the value or the set mode. y DOWN button ( button) Use to change the mode or decrease the set value. 53 Digital Flow Switch Series PF2D For Deionized Water and Chemicals Functions/PF2D Refer to the Instruction Manual for information on setting and operating.

Single Axis Electric Actuator Series LJ1H

m (kg) Refer to page 145 for deflection data. 32 Standard Motor/Vertical Mount Specification Series LJ1H20 Dimensions/LJ1H202PF Scale: 10% 12.5 9.5 Work piece mounting reference plane 110 67 20 4-M6 x 1 thread depth 15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53

Square Tube Type Air Cylinder Series MB1

53 73 73 MB-B03 MB-B05 MB-B08 Rotation Bore size (mm) A Method for longitudinal mounting of clevis bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

Compact Rotary Actuator Series CRQ2

S A 3H9 effective depth 2 3H9 effective depth 2 TD 0.6 TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BU H Size Rotating angle 10 15 90, 180, 360 29 12 18 42 (8.5) 8.5 17 6.7 2.2 16.7 5 90, 180, 360 31 14 20 53 (9.5) 9 26.4 10.6 23.1 6 W Q S US UW ab M TA TC TD Size Rotating angle 90 56 10 4.5 17 35 44 6 9 15.5 8 15.4 180 69 360 97 90 65 15 5.5 20 40 50 7 10 16 9 17.6 180 82 360 116 AU dimension

Precautions 1

53 11 10 88 16 29.8 154 143.5 DIN Terminal Double Solenoid Max. 21 Max. 10 89 56.5 49.5 Min. 18 Manual override Applicable cable O.D. 3.5 to 7 Manual override For the mounting brackets of flange, single clevis, double clevis and head side trunnion style, the doule soleoid may not be used depending on the mounting conditions.

CRBU

vane type CRBU2W40-S/D (mm) h Keyway dimensions l b h (h9) l Model b (h9) CRB2 52 64 CRBU2W400 0.030 4 20 0 0.030 4 CRBU2 CRB1 85 MSU CRJ 2-M5 x 0.8 through 2-5.5 through CRA1 25h9 0 0.052 38 CRQ2 10g6 0.005 0.014 11.5 2 MSQ 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 MRQ 20 30 2-5.5 through D2-5.5 through 38 20 3 205 5 16 14 (98) 53

Digital Pressure Switch

For instructions on how to enter the security code, refer to "How to input and change the security code" on page 53. If the security code entered is incorrect, [FAL] will be displayed, and the security code must be entered again. If the wrong security code is entered 3 times, [nG] is displayed and the device returns to function selection mode.

Environment

15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53

Refrigerated Air Dryers

Applicable air dryer Port size Rc A B C D Weight [kg] I D F IDF-BP317 IDF22E 1 134 405 928 198 4.4 IDF-BP318 IDF37E 1 1/2 980 7.7 IDU-BP336 IDU22E 1 93 445 1465 46 4.5 IDU-BP337 IDU37E 1 1/2 64 550 1635 70 8.0 I D U Dimensions [mm] IDU-BP338 IDU55E 2 53 530 1783 110 12.3 IDU75E 1918 Part no.

90

9.5 M12 x 1 Mounting hole 2 M28 x 1.5 BLEED 113.3 2 x 1/4 Port size 72 45.6 14 IN OUT 30 64.5 EXH EXH 2 x 1/8 Pressure gauge port 50 802 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR30l0-0ll-A 76 12.5 ARJ 2.3 Bracket (Option) 48 Mounting hole for hexagon panel nut Bracket AR425 to 935 76 ARX Max. 4 AMR 48 Panel ARM Pressure gauge (Option) ARP 48 68.5 53

JA/JAH/JB/JS

nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5 M27 x 2 M30 x 1.5 M30 x 2 M33 x 2 M36 x 1.5 M39 x 1.5 M42 x 3 M48 x 1.5 D C B H B H C D CE1 29 29 31 34 34 34 39 39 39 44 44 48 53