ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

VFS

Note 5) Based on JIS C 4003.

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

CQS

16; 5 stroke, 20; 5 to 15 stroke, 25; 5 to 10 stroke, 20 with auto switch built-in magnet; 5 stroke.

53

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

CV/MVGQ

L 16 60 S 5 L CVJ3 Without auto switch L S 5 L J79W 16 60 CDVJ3 With auto switch Number of auto switches Action S T Single acting, Spring return Single acting, Spring extend Built-in magnet 2 pcs. 1 pc. n pcs.

2/3 Port Valve

(No need to add options "S" and "L".)

SMC Pneumatic Clean Series

cover port location Axial direction (R) A F NA NB BB 0 -0.3 BA 0 -0.3 S + Stroke H Z + Stroke (mm) 11 11 11 3 CA GA BA CB GB GC F D BB A 3 NN Z T S NA M3 x 0.5 MM Bore size NB NDh8 8-0.022 H 9.5 9.5 7 0 18.3 15 15 15 15 15 16 10 6 28 28 28 17 17 20 M8 x 1.0 57.5 83 82 85.5 20.5 20.5 24.5 18.3 12 20 14 5 4 8 8 8 5 5 12 10-0.022 0 55 54 5 5 M4 x 0.7 M10 x 1.0 12-0.027 0 M5 x 0.8 M12 x 1.0

REC

100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 60 (High temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Operating time s 0.15 0.35 0.4 0.54 0.7 0.08 KF (NW), CF KF (NW) KF (NW),

CNA

m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard CDNA L N 50 100 JN D A53 With auto switch Number of auto switches With auto switch 2 S 1 Mounting n n B Basic

17

(mm/s) FE = 1.4amg Note 5) 1 3 ME = FEL1 = 4.57amL1 (Nm) DNote 4) 1.4a is a dimensionless coefficient for calculating impact force.

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Cylinder

:p:I L.LJ ~LI--_-II \ ~ '-' f-tw'~ S H r; A Rod end without thread . 1 R H ~. -I Z s . I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

HEC_W-E

ARW: Anti Reset Windup 5. I Constant Setting range : 1 to 999sec Min. increment : 1sec I C o n s t a n t Indicated content : I constant(Ex. : 50sec) M O D E < 5 0 s e c Function : Sets integral time used for PID control. 6.

High performance type Step Motor Controller (Servo/24 VDC)

6 B A-2 B-3 A-3 Yellow 5 3m 3 Green 3 Blue 4 5m 5 Shield (3) Vcc B-4 Brown 12 Actuator cable type GND A-4 Black 13 A B-5 Red 7 Nil Robot cable A A-5 Black 6 B B-6 Orange 9 S Standard cable B A-6 Black 8 3 (4) B-1 A-1 B-3 A-3 Red 4 Black 5 Brown 1 Blue 2 Electric actuator side Controller side (8) A1 (1) B1 14.2 1 (2) 2 10.2 (17.7) 14 18 L A6 B6 5 6 A1 B1 A3 B3 1 2 (5.7) (4) 15 16 11 30.7

PFxx-OMA1007

Wireless communication timeout 0.1 s/0.2 s/0.5 s/1 s/2 s/5 s 500 ms Base -46No.PF-OMA1007-B Item Definition Setting range Default settings Effective range Setting target Parameter [EXA1-20] 5 to 525 L/min [EXA1-20] 25 L/min Common Sets the standby flow rate (threshold value).

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product