SMC Corporation of America
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Note 2) JIS B 8370 : Pneumatic system axiom. Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

There is a possibility of plasticizer and other materials precipitating on the tube surface and detracting from the cleanliness level of the room. 40 to +100C, Water: 0 to +50C (No freezing) Nylon 12 Operating temperature Note 2) Material Note 1) Refer to the Printing/Fluid.

Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.

Air Operating pressure range 0.2 to 1.0 MPa 0 to 1.0 MPa External pilot air pressure 0.2 to 1.0 MPa Frequency adjustment range 1 to 5 Hz 1 to 8 Hz Proof pressure 1.5 MPa Ambient and uid temperatures 10 to 50C Lubrication Not required C [dm3/(sbar)] 12 14 Flow rate characteristics (IN port OUT port) b 0.14 0.18 Cv 2.9 3.4 Dimensions [mm] Internal pilot Fig. 1 OUT port 4(A) Plug Plus Minus

ID20 ID30 ID40 ID60 Model 80 155 330 780 20 37 85 195 100 192 415 975 Recycled air flow rate Note) (L/min (ANR) Outlet air flow rate (L/min (ANR) Inlet air flow rate (L/min (ANR) Port size (Nominal size B) Weight (kg) 1 4 1 2 1 2 3 4 7 8.5 18.5 25 Supply dry air with a low dew point below 30C. Compact and lightweight without heater and electric control board.

, VZS2000 SOL VALVE 4/5 PORT, 2I, VZS2000, .44000 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2) C [dm3/(s?

, VZS2000 SOL VALVE 4/5 PORT, ND, VZS2000 BASE MT 1/8, .35200 lb, Type of actuationModelPort size RcFlow characteristics(1)Max. operatingcycle (CPM)(2)Responsetime (ms)(3)Weight(kg) 1 4/2 (P A/B)4/2 5/3 (A/B R1/R2) C [dm3/(s?

(P A/B)4/2 5/3 (A/B R1/R2)Standard(0.4 W)Quick response(0.95 W) C [dm3/(s?