125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Applicable Auto Switch Model

Cylinder speed-1000 mm/sec. Sequencer response time-0.1 sec. Detecting point despersion-Within 100mm (=1000 mm/sec. X 0.1sec.) Take PLC response time into consideration when using.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

PDisconnectionPress the lever against the connector housing and pull it outward from the solenoid : 300 600 1000 1500 2000 2500 3000 5000 For DC SYJ312-5LO-M3 SY100-30-4A-20 6 10 15 20 25 30 50 How to Order To order a valve with lead wire length of other than 300mm, indicate part numbers. of the valve without connector and the required connector assembly separately.

VEX1

X Tank capacity 1000 Relief time that is read t = 2000 1000 = X 23 = 46 The result is 46S. From the above, the relief time is 263=23S 5.1-5 VEX1 Construction/Operation Principles/Component Parts [1] When A port pressure is high. [3] When A port pressure is low.

VQ5000

500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM Pressure Characteristics

CLA

I , ~ R. t:l' t y X BN N X Y 1 S + Stroke H LS + Stroke ZZ + Stroke Long Stroke Bore size Stroke ) (mm) range (mm) RT RV 40 501-800 50 601 1000 1001 1200 30 76 , 63 601-1000 1001-1200 40 92 80 751-1000 1001 1400 45 112 100 7511000 . . .

Speed Controller with One-touch Fitting

AS3201F, AS3211F AS3301F, AS3311F AS4201F, AS4211F AS4301F, AS4311F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13, 16 10, 11, 12 1500 1000 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 08, 09 06, 07 1000 500 500 0 0 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

0.4

AXT661ALead wire length (mm) 6 43 Blanking plate with connector Connector Connector lead wire length (mm) 43 44 4-wire 2-wire Lead wire color: Black Lead wire color: Red Nil 300 600 1000 2000 3000 Nil 300 20 25 30 2000 6 10 20 30 Nil Without connector With connector/2-wire With connector/4-wire 1 2 6 10 15 600 2500 1000 3000 Lead wire color: White 24AWG 1500 Cover O.D. 1.5 Blanking plate

For post-stoppage positioning and locking

.) * Values for W-R1 Series Integration of the clamping unit and cylinder unit reduces design and assembly labor Cylinder Approx. 70 Clamp assembly 436 mm Selectable proximity switch for checking arm operation (Option) 250 mm Selectable when the mass of the transferred object is either 1000 kg or 3000 kg, with consideration given to the impact during positioning 15-E655 W-R1/W-R3 Series

ZP

Assuming that the tube I.D. is 2 mm, the piping capacity is as follows: V = /4 x D2 x L x 1/1000 = /4 x 22 x 1 x 1/1000 = 0.0031 L (2) Assuming that leakage (QL) during adsorption is 0, find the average suction flow rate to meet the adsorption response time using the formula on the front matter 17.

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

JA/JAH/JB/JS

125, 140 M30 x 1.5 54000 36000 3 55000 160 M36 x 1.5 71000 55000 Option/Thread nominal size JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 20 M8 x 1 1100 1100 1000 0.5 Series JA 25 M10 x 1.5 2500 2500 2000 0.5 Precautions 32 M10 x 1 2500 2500 2000 0.5 30, 40 M12 x 1.25 4400 4400 4400 0.75 Be sure to read before handling.

MG

Standard equipped with shock absorber -X 75 100 125 150 200 250 300 20 25 32 40 50 63 80 100 20 25 32 40 50 20Series MGC P . 8-21-6 Data Series MGG V V V V V V V V V V V V V V Guide Cylinder Guide Table Cylinder with Turntable Series MGC Long stroke Bore size (mm) Standard stroke (mm) Compact type of series MGG Lightweight, space-saving 250 300 350 400 450 500 600 700 800 900 1000 1100 1200

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Nozzle Type Ionizer

Static Neutralization Characteristics (Discharge Time from +1000 V to +100 V) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 5 5 0.05 MPa 0.1 MPa 4 4 Discharge time [s] Discharge time [s] 0.3 MPa 3 0.05 MPa 3 0.1 MPa 2 2 0.3 MPa 1 1 0.5 MPa 0.7 MPa 0.7 MPa 0.5 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Distance [mm] Distance [mm] eFemale threads

JA/JAH/JB/JS

2500 2000 5 0.75 40 M14 x 1.5 6000 4400 4400 1 50, 63 M18 x 1.5 11000 11000 9000 1.25 80 M22 x 1.5 18000 18000 14000 2 100 M26 x 1.5 28000 28000 22000 2.5 125, 140 M30 x 1.5 54000 36000 36000 3 160 M36 x 1.5 71000 55000 55000 Option/Thread nominal size JA20-8-100 JA25-10-150 JA32-10-100 JA40-12-125 JA40-12-150 JA40-12-175 JA50-16-150 JA63-16-200 JA80-20-250 20 M8 x 1 1100 1100 1000

Floating Joint

5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M36 x 1.5 19 54 123 123 1100 2500 4400 11000 18000 28000 54000 71000 1100 2500 4400 11000 18000 28000 36000 55000 1000