Bearing Style: Slide Bearing, Bore Size: 50mm, Port Type: G, Stroke: 250mm, Locking Direction: Extension Stroke Lock, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bearing Style: Slide Bearing, Bore Size: 50mm, Port Type: NPT, Stroke: 250mm, Locking Direction: Extension Stroke Lock, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Mounting: Front Flange, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewied Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Magnet: Built-in, Series: with End Lock, Mounting: Front Flange, Tube Material: Aluminum Tube, Bore Size: 80mm, Port Thread: Rc, Stroke: 250mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Front Lock, Release Type: Non-locking Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 250, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～60, End Locking: [Included] Presence, Cushion: Rubber Bumper on Both Ends, Port thread type: Rc, Auto Switches: M9P, Lead

Mounting: Basic Style, Bore Size: 32mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 250mm, Option: Rear Plate, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Foot, Bore Size: 32mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 250mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bore Size: 50mm, Port Type: Rc (PT), Stroke: 250mm, Lock Position: Rear Locking, Manual Override: Non-locking Type, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Bore Size: 80mm, Port Type: Rc (PT), Stroke: 250mm, Lock Position: Front Lock, Manual Override: Locking, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -

Speed Controller: Standard Type Large Flow In-line Type AS Series

Description Material AS800 AS900 6 7 8 O-ring O-ring Spring NBR NBR Stainless steel KA00069 KA00460 14115 KA00072 KA00462 14124 ASN AQ ASV Dimensions: AS420/500/600 Dimensions: AS800/900 AK VCHC ASR ASQ 2 x Port size 2 x Port size L3 L2 L1 D Dimensions L1 L2 D Min. L3 (1) Model Port size Max.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

PFxx-OMO0007CN

NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T 4 (312 ) 40 g -11No.PF-OMO0007CN (IN ) 1 DC(+) 2 OUT2 3 DC(-) (OUT ) 4 OUT1 INOUT (UP) (SET) (DOWN) LED (OUT1) (OUT2) (OUT1) LED (OUT1) OUT1 ON (OUT2) OUT2 ON (UP) ON/OFF (SET) (DOWN) ON/OFF -12No.PF-OMO0007CN D

PF-OMN0011_C

[F 2] OUT2 -37No.PF-OMN0011CN-C d. ([ tP]) 4. [F 2] OUT2 e. ([ tPL]) [ tPH] or [ tnH] ([ tPH]) 4.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

D Not available at 80 and 100. Note) Mounting brackets are not mounted and are supplied loose at the time of shipment.

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Magnet: D (Built-in), Mounting: D (Double Clevis), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 400mm, Option: N (w/o Cushion), Cylinder Switch Type: M9PV--Solid State , Gen.

Magnet: D (Built-in), Mounting: D (Double Clevis), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 180mm, Thread: TN (NPT), Stroke: 400mm, Option: N (w/o Cushion), Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs.

Magnet: D (Built-in), Mounting: D (Double Clevis), Tube: 125~160 Aluminum (with or w/o magnet);180~200 Steel (w/o magnet),Aluminum (w/magnet);250 Steel, Bore Size: 125mm, Thread: TN (NPT), Stroke: 150mm, Option: Cushion at Both Ends, Cylinder Switch Type: No Switch, Lead Wire or Pre-wired Connector: 0.5m Lead Wire (Or None in the Case of No Switch), Number: 2 pcs.