11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Grade 2 Grade 2 Rubber stopper Grade 4 Grade 4 Metal stopper Auto switches / Proper mounting position for stroke end detection 11-/22MXP6 A A C D D B Reed switch D-A93 Solid state switch D-M9B, D-M9N Stroke (mm) Auto switch operating range 10 34.5 35.5 14.5 15.5 Stroke (mm) Auto switch operating range 10 30.5 31.5 18.5 19.5 Model Model 5 25.5 26.5 13.5 14.5 A B C D A B C D 11-/22-MXP 6

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

3 Way,3 Port Solenoid Valve NVZ Series

Lubrication aTh yah,e h8 bon lub,ric.td ior ltb d nrlnubcfrirE. and dor noa lqoirr fudfiar fubdcdion in svba. ef a lubricant is used in the system, use turbine oil type #1 (lSO VG32). lf lubricant has been used in the system, do not cease to lubricate, as the original lubricant applied during manuiacturing will have been washed away. See table of suggested lubricants.

IDX-OM-W032

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

Round Type Hydraulic Cylinder

Mounting correctly Mounting incorrectly Solid state D-G59, D-G5P, D-K59, D-G5BA D-G59W, D-G5PW, D-K59W D-G59F, D-G5NT, D-G5NB Solid state D-H7A1, D-H7A2, D-H7B, D-H7BA D-H7C, D-H7NF, D-H7NW, D-H7PW, D-H7BW Reed D-C73, D-C76, D-C80, D-C73C, D-C80C Reed D-B53, D-B54, D-B64, D-B59W Auto switch Auto switch Auto switch mounting screw M3 x 0.5

MK

-www.stevenengineering.com D-M9 D-F9W W D-M9V D-F9WV Hs Hs D-F9BAL Hs Hs D-A9 D-A9V D-M9, D-F9W D-M9V, D-F9WV Auto switch model W 19.5 21.5 B 4.5 4 A 11.5 12 W 5.5 6 B 4.5 4 A 11.5 12 Hs 17 19 B 0 0 A 7.5 8 W 1.5 (4) 2 (4.5) B 0 0 A 7.5 8 Symbol Bore size (mm) 12 16 D-F9BAL Auto switch model W 14.5 15 Hs 17 19 A 10.5 11 B 3.5 3 Symbol Bore size (mm) 12 16 ( ): Denotes the values of D-A93

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Auto Switch Proper Mounting Position (mm) Auto switch model D-M9 D-M9W D-A9 Bore size A A B B 20 25 32 40 10.5 9.5 6.5 5.5 10.5 9.5 6.5 5.5 11.5 10.5 7.5 6.5 17.5 15.5 13.5 11.5 Note) The above-mentioned value is a guide for auto switch mounting positions for stroke end detection.

Series 11-MXJ Air Slide Table

Auto Switch Proper Mounting Position (Detection at Stroke End) Solid state auto switch D-M9 Reed auto switch D-A93 C B A Lead wire, in-line entry Values in the table below are used as a reference when mounting the auto switches for stroke end detection. For actually setting the auto switches, adjust them after confirming their operation.

MXQ

8 to @0, $1 to $4 (1 set) 8-5-45 46 Series MXQ Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model A 10 20 30 40 50 75 100 125 150 10 20 30 125 40 50 150 75 100 11.5 (9) 29 (26.5) 19.5 (17) 24.5 (22) 29.5 (27) 44.5 (42) 11.5 (9) 14 (11.5) 19.5 (17) 18.5 (16) 31.5 (29) 30.5 (28) 3.5 (1) 10 (7.5) 12.5

Series MXP Precision Air Slide Table

Wiring Electrical entry Auto switch type Electrical entry from inside 3-wire D-F9P B Solid state switch D-F9 In-line 2-wire D-F9B 3-wire D-F9NW,D-F9PW In-line 2 color indication solid state switch D-F9 W 2-wire D-F9BW 3-wire D-F9NWV,D-F9PWV Perpendicular B 2-wire D-F9BWV Install auto switch as shown in figure below.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

How to Order B 20 30 D C CQSY Without auto switch F9BW S B 20 30 D C CDQSY With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J B + Stroke A + Stroke L Rod end male thread H1 Rod end nut C1 X L1 Rod End Male Thread (mm) Bore size (mm) 63 Auto switch D-A9, F9 C1 X H1 L1 26 28.5 M18 x 1.5 33.5 80 32.5 35.5 M22 x 1.5 43.5 100 32.5 35.5 M26 x 1.5 43.5 (mm) Without auto switchWith auto switch Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, A90V D-A93, A93V D-A96, A96V Series CQSW Basic Non-rotating Rod 12 16 5, 10, 15, 20 25, 30 How to Order . 1 Construction . 9 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series

Rotary Table

Load voltage Internal voltage drop (illuminated load current load when ON) range AC DC 24V or less 50mA Relay D-A90 AC DC 48V or less 40mA Not provided PLC D-A90V IC circuit AC DC 100V or less 20mA D-A93 2.4V or less (up to 20mA) 3V or less DC24V 5 to 40mA D-A93 Provided Relay (up to 40mA) D-A93V PLC D-A93V 2.7V or less AC100V 5 to 20mA 2.7V or less D-A96 D-A96V DC4 to 8V 20mA 0.8V or less

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

63 80 100 MGTL D-Y5 type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange