Guide Cylinder Series MGG

100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

5 Port Solenoid Valve Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

High Vacuum Angle Valve, XL Series

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

VXP21/22/23

550 740 1200 12 23 31 49 23 31 49 215 415 560 880 415 560 880 3300 1 4 1 2 1.0 1.0 1.0 1.0 1.0 1.0 Water Air Oil 1.5 4200 5400 Steam 1.0 5900 32A 7300 40A 9200 50A Note) Weight of grommet type.

Interface Regulator for VQ4000 5 Port Solenoid Valve

1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure

Series SV

0.7 0.8 0.9 1.0 200 CM2 20 50% 70% 10% 30% 150 Stroke mm AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 200 CM2 25 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

XL

1200 1200 1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 8.07000 lb. Q34.

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 6.99000 lb. Q34.

e-Actuator Integr Controller /SLD Typ, EACTUATOR WITH INTERGRATED CONTROLLER, Q34, 8.63000 lb

e-Actuator Integr Controller /SLD Typ, EACTUATOR WITH INTERGRATED CONTROLLER, Q34, 8.91000 lb

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 11.47000 lb. Q34.

e-Actuator Integr Controller /SLD Typ, EACTUATOR WITH INTERGRATED CONTROLLER, Q34, 6.95000 lb

e-Actuator Integr Controller /SLD Typ, EACTUATOR WITH INTERGRATED CONTROLLER, Q34, 7.79000 lb

e-Actuator Integr Controller /SLD Typ, EACTUATOR WITH INTERGRATED CONTROLLER, Q34, 9.75000 lb

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 6.39000 lb. Q34.

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 9.19000 lb. Q34.

EACTUATOR WITH INTERGRATED CONTROLLER. e-Actuator Integr Controller /SLD Typ. 8.11000 lb. Q34.

Basic Type/Direct Mount Type

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 CY3B CY3R CY3B CY3R CY1S 63 63 1200 40 40 1100 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) H CY1L Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 CY1H 1500 600 25 25 500 400 300 200 100 CY1F 1000