Serial Transmission System Series EX250 Series EX500

For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified

Thermo-chiller

water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 Ensure that the overow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller.

HRS100/150

equipment 7 1 2 Facility water inlet (Water-cooled refrigeration) 8 1 Fluid supply Automatic fluid fill port 2 2 6 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 * Ensure that the overflow port is connected to the wastewater collection pit in order to avoid damage to the tank of the thermo-chiller

PA3000/5000/PAX1000

Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) Series PAX1000 How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID

3 Port Solenoid Valve

equivalent to 2 mA.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

However, the piston speed at this time should be adjusted to the minimum speed. 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 20 65 10 D-H7LF (n = 2, 4, 6 ) 15 + 50 n 2 2 D-B5 D-B6 15 75 10 (n = 2, 4, 6 ) Mounting 75 + 55 (n 2) (n = 2, 3, 4, 5 ) 20 + 50 n 2 2 Caution D-B59W 20 75 15 (n = 2, 4, 6 ) 1.

53

2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

PSxx-OMV0003CN

(ZS-50-A) A M4X6L B(ZS-50-B) B M4X6L -14No.PS-OMV0003CN-G -02-N02 8~12 Nm -F02 4~5 Nm 24 () -15No.PS-OMV0003CN-G ()336 336 -16No.PS-OMV0003CN-G FG M12 M12 (Port Class A) 1 DC(+) DC1224 V 2 OUT2 2 3 DC(-) 0 V 4 OUT1 1 IO-Link 1 L+ DC1830 V 2 DO 2 3 L0 V 4 C/Q (IO-Link)/1(SIO) -17No.PS-OMV0003CN-G NPN 2 DC(+) OUT1 OUT2 DC(-) PNP 2 DC(+) OUT1 OUT2 DC(-) IO-Link L+ C/Q IO-Link

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) Series PAX1000 How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID

Process Pump Series PA3000/5000/PAX1000 Series PB1000

PAX1000 Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT

Air Pilot Operated Series NVSA

Pin, Mentfotd Block atignment. llcEslary lor al6gmblies ovgr lour i4) valvesI AXT 22&3 M0x60 MA 40$2 2 1 NXT 02(!144 NXT 0t&Sl P20 AXT 22S4A NXT 0t0.t7-, /.=.>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

EX500-GPR1A.eng

2.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.

VEX-OMY0001

DC + 3) 1) 0.5Nm20% 180 AC DC o (DIN ) DIN DIN B1B09-2A () GM209NJ-B17 (CE ) (DIN ) 10 No.VEX-OMY0001 1) 2) 3) 1.351.45Nm P8,9 02 03 04 02 03 04 04 06 10 10 12 01 02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 VHS500-06 VHS501-06 Pipipng direction Port size 3 4 1 2 3 8 1 4 1(P) 2(A) 21 105 76 54 35 35 57 93 Effective area (mm2) Mass (kg) 2(A) 3(R) 0.25 0.34 The front face of the handle is the reference position. Easy to Operate The direction of air flow can be verified at a glance by the orientation of the handle.

VZA200/400

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from

Air cooled Thermo-con (Compact type)

Symbol Terminating resistance FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 2 2 2 9 9 9 5 SG 5 SG 5 SG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No.

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

How to Order AMJ Metric size Applicable tubing size Metric size (Release button: Light gray) AMV Symbol Bore size Applicable model AEP B ZFC 0 02 05 Metric size ZFC05 ZFC10 ZFC20 02 23 04 06 08 2 3.2 4 6 8 HEP Made to Order B Inch size ZFC 1 05 01 Related X17 Metal case Equipment Refer to page 1115 for details.