ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Table of Contents

Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !

VFS

Spool/Sleeve Adapter plate r Aluminum die-casted t Aluminum die-casted End plate y Resin Piston u Resin Junction cover i Resin Light cover Part no. for mounting bolt and gasket BG-VFS5000 Replacement Parts VFS51 VFS52 VFS53/54/55 Part no. No. Description Material Return spring Gasket Stainless steel NBR VFS5000-9 AXT627-10-1 AXT627-10-1 AXT627-18 AXT627-10-1 o !0 !

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Compact 5-Port Solenoid Valve

Specification External pilot (SUP/EXH block assembly) q e r t w y u i q Series w Type 10 Side ported e Wiring 1 JSY1000 3 JSY3000 5 JSY5000 TC Spring type terminal block box T Terminal block box r Valve stations t P, E port entry U U side (2 to 10 stations) D D side (2 to 10 stations) B Both sides (2 to 24 stations) TC: Spring type terminal block box T: Terminal block box Symbol Stations

Best Pneumatics Vol. 14

40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V]

High Vacuum Angle Valve

Nil A B C None w, e, r, t w, r, t e 1.3 x 10-11 (FKM) 1.3 x 10-9 DSeal material 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 L-M6 C 4H9 Refer to Cross section C-C.

Made to Order

Without auto switch magnet Bore size 20 to 32 With auto switch magnet Bore size 32 T G With auto switch magnet Bore size 20, 25 L A + Stroke A G L Bore size (mm) T 125 stroke or more 10 10 10 10 10 125 to 300 stroke 12 22 23 23 25 27 75, 100 stroke 50 56.5 58.5 64 73.5 85 125 to 300 stroke 67.5 77 78.5 80 91 102.5 100 stroke or less 5 5 5 5 5 100 stroke or less 4.5 5 7 17 18 18 20 22

CJ2

Bore size (mm) 6 CJ-L006B CJ-F006B Mounting bracket 10 CJ-L010B CJ-F010B CJ-T010B T-bracket is used with double clevis (D). 16 CJ-L016B CJ-F016B CJ-T016B Foot bracket Flange bracket T-bracket Auto Switch Mounting Bracket Part No. (Band mounting style) Bore size (mm) 6 10 16 Auto switch mounting bracket no.

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

CJ2

Sliding Resistance at the Low Friction Side Mounting Bracket Part No. 0.08 Bore size (mm) 16 Mounting bracket 10 10 0.07 Foot CJ-L010B CJ-L016B 16 Sliding resistance(MPa) Flange CJ-F010B CJ-F016B 0.06 T bracket CJ-T016B T bracket is used with double clevis (D). CJ-T010B 0.05 Auto Switch Mounting Bracket Part No. (Band mounting) 0.04 Bore size (mm) 10 16 Bracket part No.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Hydraulic

10 15 15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Table of Contents

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Modular F.R.L. Unit

Note 2) Drain guide: G1/4 (applicable to AC25 to 60) AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR Port size M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 AC20C to 40C AF + AFM + [T] + AR AC20 to 40 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-

2/3 Port Valve

T Conduit terminal See table 1 below for applications.

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.