.); Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2")

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: Rc, Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: U (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Piping: U (U Side: Open; D Side: Closed), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: C (OUT1: NPN; OUT2: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: M (Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: R (w/Bracket), Calibration

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: None, Calibration Certificate

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: 1 (OUT1: Analog 1 to 5V), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: R (Bracket), Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: JT (OUT1: Analogue 1 to 5 V - OUT2: Analogue 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: 1 (Out 1 Flow Rate: Analog 1 to 5 V; Out 2 Temperature: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Unit Specification: Instantaneous Flow: L/min, Temperature: °C, Bracket: R (w/Bracket), Calibration

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, threaded type valve , Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.) , Normally closed (N.C.) , Port size: 01 (1/8), 02 (1/4), 03 (3/8), 04 (1/2), Pilot port thread: Rc, NPT HIGH PURITY CHEMICAL VALVE, HAND OPERATE.

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: F (G), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.