Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Specifications: 2 [With output (Alarm output x 2 + analog output (4 to 20 mA DC))], Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: Rc1/4 - M20x1.5, CE Compliant: -

Type: Smart Lever Type, Pressure Gauge: 1.0 MPa, Specifications: Basic, Accessories: For Stroke 50 to 140mm w/Lever Unit, External Scale Plate: None, LCD Window: Body w/LCD Window, Connection, Air - Electric: NPT1/4 - NPT1/2, CE Compliant: -

Type: Relay Device, Type: Smart lever type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive Category

Type: Relay Device, Type: Smart lever type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: N/A, Air connection port: Rc1/4, Conduit connection port: M20 × 1.5, Explosion-proof structure: ATEX Directive

Type: Relay Device, Type: Smart lever type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: Rc1/4, Conduit connection port: G1/2, Explosion-proof structure: ATEX Directive

Type: Relay Device, Type: Smart lever type, Specification: With output function {Analog (4 to 20 mA DC) Output + Alarm output × 2}, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: With Stroke 35 to 100 mm / lever unit, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof

CYP

Guide shaft mounting surface n = 1 + 2 + 3 + 4 = 0.20 + 0.24 + 0.13 + 0.16 = 0.73 n = 0.731 Therefore it can be used. 12 Series CYP Model Selection 3 Precautions on Design (2) Table Deflection Note) Displacement of table due to pitch moment load Displacement of table due to yaw moment load Displacement of table due to roll moment load Guide central axis F A F F L L A L Guide central axis

Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

With Factory Installed

Exampte)26NW o f "f able 'pllonaISpeci Ica rIons comb' matlon T Filter 1Regulator applicable model Optional specifications 2 6 8 C J N W Description Symbol Auto drain D D C 1 AW2001 AW3001 AW4001 I Differential pressure type auto drain D ActessOlY Float type auto drain(N.O.) 0 (Optioo) Float type auto drain(N.C.)

PSxx-OMU0005CN

[F 1] OUT1 1 2 2 -33No.PS-OMU0005CN-C H_1 WH1 WH1 H_1 WH1 WH1 OFF OFF 1Er689o.rEr12() : OUT1OUT2"1""2"()P_1P_2 -34No.PS-OMU0005CN-C [F 2] OUT2 OUT2 ONON 34 <> [F 2] OFF [OFF]OFF 25 [Err] [P_2] [P2L][P2H] [P_2][n_2] P n (62 ) -35No.PS-OMU0005CN-C 25 [H_2] [WH2] (62 ) 27 ON ON ON ON OFF OFF OFF OFF OUT2 OUT2 OUT1 OUT1 [F 2] OUT2 1 2 2 -36No.PS-OMU0005CN-C [F 3] <>

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

VCA

) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290

NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

IZx-OMT0049

Made to Order Symbol Description Specifications Manufacturable bar length (Symbol) 106n (n is an integer from 1 to 39) -X10 (Use standard product when n is 1, 2, 4, 5, 6, 8, 9, 12, 17, 20, 25, 30, 37) Non-standard bar length Bar + High voltage power supply module + Controller IZT 40 52 D 1 6H R F X10 IZT 42 52 D 1 6H R F X10 Transistor Input/Output IZT 42 52 D 1 6H R L F X10 Bar IO-Link

Process Valve Series VNA

Valve size 1: VN1-A16 (with thread) Valve sizes 2 to 4: VN-16 Nil F N T A B C NBR seals FKM seals EPR seals Nil B Note) None With bracket Refer to Table (1) for availability.

Digital Pressure Switch

Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 41 F80 Power saving mode 42 F81 Security code 43 F82 Input of line name 45 F90 Setting of all

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

Air Cylinder RSQ Series Stopper Cylinder

Cancel cap (mechanism to hold lever horizontallv) Series Variation ^ -" l f' -Rod erd I s*ardarc lry | "** I lT* I @'@-i*rrry o5O . ' l i i : , . , . . . ' t . ' . Stopper Cylinder / Fixed Mounting Height Senbs RSO Bore Size '. d20, d32, s4O, s50 How to Order nsoH WW nspa@ . Port lype t f f i XCl6l Airlon:NP a N||mhar ^l cwitihac a Number of switches --a:T 1 p" With auto switch .