HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

PSE530/200

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

Thermo-chiller

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

Round Type Hydraulic Cylinder

L tap 4 x J counter bore Related Products 4 x K 20: I-020B 25: I-032B 32: I-04A 40: IA-04 RR1 NDH10 DI A B E F G MM 45 RR1 MM NDH10 D +0.2 +0.1 E1 M C E1 R U U1 U1 A1 NX 8.6 A1 L1 L1 NX H Material: Cast iron Material: Rolled steel Material: Cast iron U (H8) Applicable bore size (mm) Part no. H G I J K L Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

(mm) Model OO PP SS VV QQ RR TT UU Applicable gasket ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C14 17 23.5 53 40 12.5 34 26 10 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 x 0.8 M6 x 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120

G15/G27

Pressure Gauge for General Purpose Series G15/G27 Standard Specifications G15 G27 Model Type Back side thread 1 8 R 1 16 Port size (1) R : M5 (Female thread) G Fluid (2) Air 5% F.S.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Driver side crimping terminals (Note 2) Applicable tool Symbol Crimping Manufacturer Body Head Dice terminal a FVD5.5-4 YNT-1210S (Note 1)b 8-4NS YHT-8S c FVD14-6 YF-1 E-4 YNE-38 DH-112 DH122 d FVD22-6 DH-113 DH123 (Note 1)e 38-6 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 (Note 1)f R60-8 YPT-60-21 TD-113 TD-125 Japan Solderless YF-1 E-4 YET-60-1 Terminal g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5

3

A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

CQM

x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 115 x 140 M6 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 120 x 145 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 M5 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 110 x 135 M3 x 25 x 30 x 35 x 40 x 45 x 50 M3 x 25 x 30 x 35 x 40 x 45 x 50 M5 x 25 x 30 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 25 30 35 40 45 50 25 30 35 40 45

Platform Cylinder Series CXT

Grease pack part no.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)

Soft Start-up Valve

How to Order Pilot Valve Assembly AV 0 B 1 2 G q w e r t A Symbol Description q Applicable model 2 AV2000-A, AV3000-A 4 AV4000-A, AV5000-A + 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC]*1 4 220 VAC [230 VAC]*1 AC (50/60 Hz) w Rated coil voltage DC 5 24 VDC 6 12 VDC + G Grommet (Lead wire length: 300 mm) D Type D (DIN terminal/With connector) Y Type Y (DIN terminal/With connector)*2 DO Type D (

Soft Start-up Valve

How to Order Pilot Valve Assembly AV 0 B 1 2 G q w e r t A Symbol Description q Applicable model 2 AV2000-A, AV3000-A 4 AV4000-A, AV5000-A + 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC]*1 4 220 VAC [230 VAC]*1 AC (50/60 Hz) w Rated coil voltage DC 5 24 VDC 6 12 VDC + G Grommet (Lead wire length: 300 mm) D Type D (DIN terminal/With connector) Y Type Y (DIN terminal/With connector)*2 DO Type D (

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Weight g Applicable solenoid valves Port size Sta dard:1W Low power Effective area mm2 (Cv factor) Number of solenoids Effective area mm (Cv factor) Number of solenoids Base model Port location Series Series Model Standard: 1W H: 15W Low power and AC P, R A, B C6 (for 6) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) 4.5 (0.25) 12 or less 15 or less VQ1130 Metal seal 3 position 2 position

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

SMC Pneumatic Clean Series

50 35 17 58 20 Up to 1000 11 7 18 3/8 40 35 70 32 9 81 110 108 177 M18 x 1.5 85 15 59 14 27 31 64 63 35 17 58 20 Up to 1000 11 7 18 3/8 40 35 86 32 130 116 101 105 188 M10 x 1.25 M18 x 1.5 11.5 Head side flange style (G) / CA2G, CA2G 10112122Relief port 2-cushion valve M5 x 0.8 GA 6 4-FD 4-J GB Width across flats KA 2-RcP Width across flats B1 FV FY D B E MM H1 AL A N C 18 K N 7 B H S +

Series MLGP

t e 2 ) 1 pcs. 15 D-P3DW(A) 2 pcs. 15 1 pc. 5 N o t e 2 ) N o t e 4 ) 2pcs.