Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

CRQ2

IC circuit Reed switch Solid state switch A96 A96V 5 V Grommet Yes Relay, PLC A93 A93V 12 V 2-wire 24 V 100 V 3-wire (NPN) M9N M9NV 5 V, 12 V IC circuit 3-wire (PNP) M9P M9PV 2-wire M9B M9BV 12 V Relay, PLC 3-wire (NPN) F9NW F9NWV 5 V, 12 V 24 V IC circuit Grommet Yes Diagnostic indication (2-color) 3-wire (PNP) F9PW F9PWV F9BW F9BWV 12 V 2-wire Water resistant (2-color) F9BA Although it

Stroke Reading Cylinder and Counter

12 V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC IC circuit 5 V, 12 V 12 V Yes Yes No Grommet 24 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 IC circuit 5 V 12 V Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water resistant type auto switches can be mounted on the above models

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

LEY-OM007

SVRE ON 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG SV0.8* 1.RESET SVRE ON 2.SETUP SV10 No. -50- 1 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -

33

V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 195 Thermo-chiller Basic Type HRSE Series

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

3-wire Grommet Yes Reed switch Z73 24 V 12 V 100 V Relay PLC 2-wire 5 V 12 V 100 V or less IC circuit Z80 No 3-wire (NPN) IC circuit 3-wire (PNP) Y7PV Y7P Y59A Y69A 5 V 12 V Lead wire length symbols: 0.5 m Nil (Ex.)

PSE550/300

1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k PSE303 PNP open collector output (2 outputs), Max. 80 mA, residual voltage 1 V or less Analog output: 1 to 5 V Output impedance: Approx. 1 k DC (+) DC (+) (Brown) (Brown) Analog output Load Analog output (Gray) (Gray) + + Main circuit Main circuit Main circuit Main circuit Main circuit Load OUT1 OUT1 12 to 24 VDC 12 to 24

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

EXxx-OMY0006CN

DO (n+1) 0 V DO (n) FE / Shield Output interface Output interface Short circuit Short circuit protection protection Output circuit / Output circuit / Bus interface Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS BUS Fig. 12-3 EX245-DY1 79

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133

0.4

3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5(R1) 1(P) 3(R2

HRX-OM-W002

M V 1 1 [ ] 2 WH 18AWG BK 18AWG BK 9 9 2 V G 3 U U [ ] 1 RD 18AWG BK 5 5 1 U (CN3) PM PUMP 7 7 Option T1 6 6 4 4 3 3 2 2 1 1 PM PUMP 2/2 PM PUMP (CN1) 16AWG G/Y G4 [ ] V G PM 16AWG G/Y G4 [ ] G U DC Power Supply Standard BL DCPS [ ] 18AWG G/Y G2 5 5 Condenser 18AWG BK 1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG

IDX-OM-W023

MC MC OLR MC PTC MC MC EDV TDR TDR For Option M TDR V CM MC For Option V OLR MC TDR MC 01 OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2

Multistage Ejector Series ZL

SYJ514 With valve 16 4 Multistage Ejector Series ZL Dimensions/Series ZL112 (without Valve) 2-5.4 Mounting hole Scale: 40% Label 50 117 Exhaust with silencer P Standard ZL112 20 V 4.5 166 56 Exhaust port Rc1/2 35 P Port exhaust ZL112P V 14 Vacuum pressure gauge Exhaust with silencer 2-5.4 Mounting hole P With vacuum pressure gauge ZL112-G V Exhaust with silencer Vacuum adapter Rc1/8 2-5.4

LJ1H

P N Ground ball screw Rolled ball screw Specifications Combinations other than the above cannot be manufactured.

Table of Contents

Series VQ1000 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46