CXS

CXSM6R CXSL6R CXSM10-R CXSL10R CXSM15-R CXSL15R CXSM20-R CXSL20R CXSM25-R CXSL25R CXSM32-R CXSL32R 3. The manual lever (1.6 x 35, tip part: M1.6 x 0.35 x 3) is included with the cylinder.

Multi-Axis Step Motor Controller

2 w e !3 !4 r t y u i !5 !6 No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

e r t y u i o !

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1lA VBA2lA VBA4lA 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N P P P P P P P P P P P P S P P P P P P P P P P GN P P P P P P P P P P P P GS P P P P P P P P P P LN P P P P LS P P GLN P P P

E-P HYREG ® Series VY1

Description Material Pilot valve assembly Feedback passage q VE Body Aluminum alloy w Aluminum alloy Cover e VY1 Aluminum alloy Adjusting piston r Spring Stainless steel t P(1) port A(2) port G Valve guide Aluminum alloy y Poppet valve NBR u PPA Shaft Stainless steel i Valve guide Aluminum alloy o AL 14-10-15 E-P HYREG Manifold Specifications Specifications Using the series VVEXB/2/4, a

R

Q U E SPECIFICATIONS SERIES NCRA1 D I M E N S I O N S S E E N E X T P A G E H O W T O O R D E R NCRA1 R O TA R Y A C T U AT O R NC RA1BW P I S T O N Basic D Magnetic S H A F T See Accessories Section A U T O S W I T C H T Y P E S Single Rod End W Double Rod End : 30mm Bore Double Rod End Only B O R E ( M M) 30 1 3/16 50 2 63 2 1/2 80 3 1/8 100 4 R O TAT I O N 90 90 180 180 C Both End Cushion

Speed Controller: Standard Type Series AS In-line Type

0 i y r u e t r i !0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !

E-P HYREG ® Series VY1 1

Description Material Pilot valve assembly Feedback passage q VE Body Aluminum alloy w Aluminum alloy Cover e VY1 Aluminum alloy Adjusting piston r Spring Stainless steel t P(1) port A(2) port G Valve guide Aluminum alloy y Poppet valve NBR u PPA Shaft Stainless steel i Valve guide Aluminum alloy o AL 14-10-15 16 E-P HYREG Manifold Specifications Specifications Using the series VVEXB/2/4

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 !1 Holder assembly replacement screw y Tubing i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

Wireless System

Cable with 7/8 Inch Connector/ Power Supply Connector p. 21 Ordering Example of the Master Unit p. 9 Ordering Example of the Slave Unit p. 9 Specifications Wireless Master Unit p. 10 Wireless Slave Unit p. 11 End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adaptor t Adaptor w Lock ring w Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

IDG

for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

IR1000/2000/3000

IRV1000 IRV2000 IRV3000 P538010-6 P538020-3 P538030-5 q w e r t y u i o !0 !1 !2 !3 !4 !5 HNBR, etc.

Series VS

Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B 7. Detent assembly SF4-mF-30 SF4-mF-30 8.

VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No. Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7

Vacuum Pad: Ball Joint Type

, 710 P.711, 712 P.713 to 717 P.713 to 717 P.718, 719 P.720 to 723 Buffer stroke Adsorption is possible even on a slanted surface.

Electric Rotary Table

. 120 Current limit resistor R Note) PP+ 1 k Pulse signal power supply voltage 24 VDC 10% 5 VDC 5% Current limit resistor R specifications 3.3 k 5% (0.5 W or more) 390 5% (0.1 W or more) PP 120 Current limit resistor R Note) 37 Step Motor Driver Series LECPA LER LECP6 LEC-G LECP1 LECPA Model Selection Specific Product Precautions Signal Timing Return to Origin 24 V 0 V Power supply ON

3 Port Solenoid Valve

0 w y !

VQC

: Locking type (Manual) C Note) 5 (R1) 3 (R2) 1 (P) Function 5 (R1) 3 (R2) 1 (P) N.C N.O Standard type (1 W) High pressure type (1.0 MPa) Negative COM External pilot Low wattage type (0.5 W) Nil K N R Y Seal type 3 position closed center Note) For rubber seal type only.