NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

C76

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 CJ1 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C CJP IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes CJ2 F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV CM2 Grommet 3-wire (PNP) J79 H7B

C76

Yes A72H A72 Grommet 200 V Reed switch Solid state switch A73H C73 A73 100 V 12 V A80H C80 A80 CJ1 IC circuit No 100 V 5 V, 12 V Relay, PLC C73C A73C 2-wire Yes 12 V 24 V Connector C80C A80C CJP IC circuit No 24 V 5 V, 12 V Diagnostic indication (2-color) A79W Grommet Yes CJ2 F79 H7A1 F7NV 3-wire (NPN) IC circuit 5 V, 12 V F7P H7A2 F7PV CM2 3-wire (PNP) Grommet J79 H7B

VQ7-6/7-8

When the release valve w is OFF , the supply pressure from port Po is blocked, and the air which was being supplied to the manifold side port P passes through the release valve and is X Pressure switch discharged from port R1. P' 3. The pressure switch is piped into the outlet side of the release valve w. (It operates when the Air filter regulator release valve w is energized.)

VQ7-6/7-8

When the release valve w is OFF , the supply pressure from port Po is blocked, and the air which was being supplied to the manifold side port P passes through the release valve and is X Pressure switch discharged from port R1. P' 3. The pressure switch is piped into the outlet side of the release valve w. (It operates when the Air filter regulator release valve w is energized.)

PF-OMN0009_C

cm] [cm] -36No.PF-OMN0009CN-F PF3W521() (250 L/min ) (250 L/min ) [cm] -37No.PF-OMN0009CN-F PVC 3F.S.11 cm IN OUT PF3W511/521(PVC ) (100 L/min ) (250 L/min ) [cm] -38No.PF-OMN0009CN-F PF3W504S PF3W520S [] [] P: P: PF3W540S [] P: -39No.PF-OMN0009CN-F () (PF3W504/520/540) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V

Multistage Ejector Series ZL112.212

4 Exhaust port 76 P Standard ZL212 40 V ZA 54 125 Label ZX 188 61 ZR P Port exhaust ZL212P ZM V ZMA Exhaust port (EXH.)

VXD21/22/23

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

Square Tube Type Air Cylinder Series MB1

(different sides, same side) 15 25 Y7P(V) 1pc. D-Y7NW(V), Y7PW(V), 2pcs. (different sides, same side) Solid state switch 20 25 Y7BW(V) 1pc. 2pcs. (different sides, same side) 20 30 D-Y7BAL 1pc. Center trunnion is not included.

Compact Electric Actuator Series LG1

MC NFB Servomotor HC-PQ Power supply Single phase 200VAC (Type A) or Single phase 100VAC (Type A1) C P U L1 U V V W Servo amp SM L2 W MR-CA E or MR-CA1 The length of the cable between the controller and servo amp is 2m or less.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Payload W (kg) 9-14-7 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

-wire (PNP) 12 V 2-wire Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 5 V, 12 V 24 V Diagnostic indication (2-color indication) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit With timer 5 V, 12 V Lead wire length symbols: 0.5 mNil (Example) E76A 3 mL (Example) E76AL 5 mZ (Example) M5NTZ Solid state switches marked with are produced upon receipt of order.

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Metric sizes Inch sizes Body class 3 1/8 3/16 4 1/4 8 3/8 10 12 19 1/2 3/4 6 1 2 3 4 5 v v v V V V V v v V V v v V V V v v V v V v Note) Refer to page 505 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling.

Compact Cylinder with Air Cushion Series RQ

A96V A96 IC circuit 5 V Yes A72 A72H 12 V 200 V 100 V Grommet A93V A90V A93 A90 IC circuit 5 V,12 V 12 V 100 V or less No Relay, PLC 2-wire A73C A80C A79W 24 V Yes No Connector IC circuit 5 V,12 V 24 V or less Grommet Yes Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ