Rotary Actuator/Vane Type

steel Size 40 only e y u MSQ o w MSZ !

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

40 18 to 30 4.5 to 30 18 to 30 3 to 30 Y = Size: 10 to 30 Size: 40 Symbol: A57 Shorten both long and short shafts.

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Drain gu de T14 AFD3O 40 NPT Flow d reclon B ghl10 left AFD20 to 40 Drain cock w lh barb flling: AFD30. 40 Nore 1)Drain !!

ZQ-OM01401

-40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 50 -60 -60 40 -40 30 -40 20 -20 -20 10 0 0 0

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

7.4

S0700 S0700 S0700 Body Ported Base Mounted Blanking plate assembly SS0700-10A-2/SS0700-10A-5 It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve etc. 40.5 40 2 B 4 A Applicable manifold Part no.

JXCx-OMT0028CN

3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1GW (B RATE) . 15 4.2 (CN2SW) . 16 4.3LEC . 16 4.4GW EtherNet/IP . 22 5. . 26 5.1 CN4 . 26 5.2 CN3 . 26 5.3 CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40

VKF300

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Type 42 Type S42 1 (P) 3 (R) (Valve leakage: 0.03 cm3/s He or less) Can be used in vacuum/release circuits VP VG Universal porting Type 40 VP N.C.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

8 STATION MANIFOLD, 4/5 PORT SOLENOID VALVE, 0.8186 lb

8 STATION MANIFOLD, 4/5 PORT SOLENOID VALVE, 673.6 lb

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 8 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 1 (0.6m), Valve Stations: 8 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 3 (3m), Valve Stations: 8 Stations, P, E Port Locations: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10M (Side Ported), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: A3N (Negative Common, 32 Outputs), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assembly: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Type: 11S (Bottom Ported), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Type: 11S (Bottom Ported), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 8 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)