1

0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 Width

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 36.1 31.1 32.1 27.1 28.2 41.7 18.5 23.9 30.9 26.8 8 15.2 3/16" 11.4 12.9 21 14 10.9 14 16.5 12.7 16.2 AS231FG-02-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08

AN

.: AN200-N02) AN600-10 270 1 1 1 AN700-12 440 1 4 AN800-14 590 1 2 AN900-20 960 2 Note) NPT thread is also available. Specify N after ANm00-.

MHZ2/MHZJ2

4 60 6.3 10 MHZJ2-10S Normally open 6 130 24 16 MHZJ2-16S 10 255 28 20 MHZJ2-20S 14 465 45 25 MHZJ2-25S 4 12 60 10 MHZJ2-10C Normally closed Single acting type, normally closed 6 31 130 16 MHZJ2-16C 10 56 255 20 MHZJ2-20C 14 83 460 25 MHZJ2-25C Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

MXW

Roll moment Mr = W x 9.8 (L3 + C) Pitch moment Mp = W x 9.8 (L1 + A1) A1: Moment center position distance compensation amount B1: Moment center position distance compensation amount (mm) C1: Moment center position distance compensation amount L3 C1 MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 (mm) (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 L1 A1 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

Rotary Gripper Series MRHQ

Single acting 1060 (3.44) 90 MRHQ20S MRHQ20C 10 20 1057 (2.33) 180 1566 (3.45) 90 MRHQ25S MRHQ25C 14 25 1560 (3.44) 180 Note 1) Values without auto switch weight.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

17.5 M8 x 1.25 18 10 20 M14 x 1.5 30 17 66 50 11 52 176 10 53 88.5 M16 x 1.5 25 9 73 73 53 20 50 28 17 17 M10 x 1.5 20 12 22 30 19 73 63 11 55 194 10 60 95 M18 x 1.5 28 8 80 80 60 22.4 55 30 17 17 M10 x 1.5 22 12 25 30 21 80 80 13 65 212 12 75 115 M22 x 1.5 32 8 100 100 75 28 65 32 22 20 M12 x 1.75 26 14 29 35 26 90 100 13 80 234 14 90 139 M27 x 2 38 6.5 118 118 90 35.5 80 35 27 19 M12 x

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

)1/8 6.2 14 ZPT50F-B8 M8 x 1.25 8 12 50 53 13.5 19.5 40 6 ZPT50F-B01 Rc(PT)1/8 6.2 14 4 Vertical Vacuum Entry Series ZPT With Buffer How to Order ZPT 10 F GN J 20 04 A10 Mounting thread diameter/male thread (Refer to Table 1 for applications.)

OMR0032

. 14 (7) Test operation . 14 3.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

710 670 20 700 230 120 222 2 1 14-13-14

Direct Operated Precision Regulator Modular Style Series ARP3000 1

AL 14-4-65

Compact Manometer Series PPA 1

For specifications, refer to page 14-12-4. 14-12-2 3 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Handling Operating Environment Warning Warning 1. Absolutely never use in an atmosphere where explosive gases are used. The compact manometer does not have explosion proof construction.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Power amplifier with feedback circuit Control circuit Electro-pneumatic proportional valve Pressure sensor Caution VEXP3141 1. Air supply Poor quality air could increase the spools sliding resistance, while preventing it from attaining its specified characteristics.

SMC Electronic Switch Series Variations

Brown DC(+) Black OUT Main circuit Main circuit + 12 to 24V DC Load SE1-ll-14, -15, -18, -19 I Z PSwitches with variable hysteresis can be adjusted by means of the HYS potentiometer in the range 1 to 10% of the ON set point.

VQ

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series