Rodless Cylinder for Vacuum Series CYV ø15, ø32

Laser marking Hexagon wrench Features 2 Rodless Cylinder for Vacuum Series CYV How to Order CYV 15 200 Rodless cylinder for vacuum Standard stroke Bore size 15 32 15mm 32mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 Specifications 15 32 Bore size (mm) Atmosphere to 1.3 x 10Pa (ABS) Operating environment pressure Air and inert gases Operating

Regulator for 2 MPa ARX 20

300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

Miniature Regulator Series ARJ310

300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Pressure Characteristics Conditions: Upstream pressure 0.7MPa Downstream pressure 0.2MPa Flow rate Q = 20l/min (ANR) 0.30 Downstream pressure MPa 0.25 Starting point 0.20 0.15 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Upstream pressure MPa Construction ARJ310-01

End Lock Cylinder Series CBJ2

Information End Lock Cylinder Series CBJ2 / 16 Cylinder stroke (mm) 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available in 1 mm increments without stroke adjustment with a spacer. For types with auto switch, refer to Minimum Strokes for Auto Switch Mounting on page 2.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100 400 500 Load N 300 200 3 Precision Air Slide Table

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

53% reduction Max. 53% Weight Overall length(Z+Stroke) Z dimension Weight (kg) (mm) Series 16 25 40 63 Series 16 25 40 63 MY3A MY3B MY1B 0.34 0.87 2.95 8.26 MY3A MY3B MY1B 110 150 240 320 0.35 0.97 3.08 8.99 122 178 276 356 0.73 1.57 4.41 14.5 160 220 340 460 *For 100mm stroke 1 Mechanical Joint Rodless Cylinder/High Precision Guide Series MY2H/HT 100 M2 m1 High precision High precision 200

Digital Flow Switch Series PFA For Air Series PFW For Water

Size (port size) For Air Series variations Flow rate Remote type Output specifications Port size (Rc, NPT, G) Integrated measurement Analog output Accumulated display type Switch output pulse output 1/8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200

LX Series Compact Electric Actuators

I direction \ j '--r:_ _ _ System diagram Supply by Lrser comFcrnecFic rouilo|'s $.0nie$ ll( Proilrd tooumr 30 :t0.03. 08; 2mm lead o5 stepping a a a a 80 08; 5mm lead 100 08; 6mm lead t0.05 200 @8; 12mm lead :a]8:?lrrin:Faq l: ':l ' :S? sleptrr.lS 19!1{11n]!

Compact Vacuum Ejector Series ZQ

Vacuum pressure switch suction filter Voltage (Refer to Table 1.) 1 2 3 4 5 6 100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter F D31 D32 D51 Electrical entry D52 L plug connector, With 0.3 m lead wire With indicator

PSxx-OMR0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5

PSxx-OMT0001CN

kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 642.5 M4000.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 645 M1600.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) ?

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800

to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication32 to 131F (0 to 55C) (No freezing)90 or less (No condensation)?

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

Direct Operated Precision Regulator Modular Style Series ARP3000 1

) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL