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Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

[White] Blue [Black] Black [White] Load Switch 1 Switch 1 Switch 1 Relay Load Relay contact Blue [Black] Blue [Black] Brown [Red] Brown [Red] Brown [Red] Relay Black [White] Black [White] Blue [Black] Black [White] Switch 2 Switch 2 Switch 2 Blue [Black] Blue [Black] The indicator lights will light up when both switches are turned ON. 2 wire with 2 switch AND connection 2 wire with 2 switch

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.

0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).

Stainless steel 9 With switch only Magnet plate Aluminum alloy 10 With switch only Switch mounting bracket 11 Scraper 12 With back-up ring Rod seal NBR 13 Piston seal 14 Tube gasket 15 Piston gasket 18 Series CHKGB Dimensions 2-Rc P F with effective thread depth G Q S Width across flats f c R D R a b g e H E C B + Stroke h + Stroke 4-K through J 8-L counter bore A + Stroke M Rod end male

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Dimensions/12 to 25 Standard (Through-hole/Both ends tapped)/CQSYB, CDQSYB 12 2-M5 x 0.8 Auto switch Lead wire min. bending radius 10 H thread effective depth C 2 x 4-OB counter bore depth RB 2 x 4-OA effective depth RA Note 1) Q F 16 I 4-N through D M E T Plain washer K B + Stroke L M A + Stroke E 20, 25 Rod end male thread H1 Rod end nut Note 2) C1 X L1 Rod end male thread Bore size (mm

No. q !0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

L O L ZX G H F K ZR J ZM ZH E D I A ZU B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL 2-4.5 ZY ZQ A B C D E F G H I J K L Model 4 ZFC100-04 ZF 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 ZP 1/4" ZFC101-07 6 ZFC200-06 ZCU 8 ZFC200-

5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Cart SMC SX3000-145-21 phcs, m3x0.5x15, SY3000 SOL/VALVE, RUBBER SEAL*** $0.70 + Add to Quote Add To Cart Add to Cart SMC SX3000-146-2

Cart SMC SJ3000-155-1A blocking disk label, SJ2000/SJ3000/SZ3000*** $13.64 + Add to Quote Add To Cart Add to Cart SMC SV2000-55-1-2-

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

screw, mounting (2 per pkg), SY5000 SOL/VALVE, RUBBER SEAL*** $4.22 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-7A screw, SY3000 SOL/VALVE, RUBBER SEAL*** $3.52 +

screw, mounting (2 per pkg), SY5000 SOL/VALVE, RUBBER SEAL*** $4.22 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-7A screw, SY3000 SOL/VALVE, RUBBER SEAL*** $3.52 +

screw, mounting (2 per pkg), SY5000 SOL/VALVE, RUBBER SEAL*** $4.22 + Add to Quote Add To Cart Add to Cart SMC SY5000-221-7A screw, SY3000 SOL/VALVE, RUBBER SEAL*** $3.52 +