CQM

3 !2 !7 !6 q e r t !5 w !4 CUJ CU CQS CQM CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !0 u y RQ MU 32 to 50 With auto switch (Built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 D-X 20Data !0 u y Description No.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

EX600-LAB1_LBB1.eng

information about outline dimensions. 4 C/Q IO-Link or standard I/O mode 3 4 5 N.C.

VQ7-6/7-8

Note 3) The weight without sub plate.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

symbol 2 position double with back pressure check valve 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 4 (A) JIS symbol 3 position closed center (A) 4 (B) 2 2 (B) 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position exhaust center with back pressure check valve 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 3 position closed center/exhaust

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Series IDG

N.O.: Black Applicable tube O.D.: 10 (NPT threads: 3/8 inch) (428) With drain guide Drain Thread size: 1/4 (without valve mechanism) Width across flats 19 (Maintenance space 100mm or more) Purge air discharge tubing port for dehumidification Applicable tube I.D.: 19 (NPT threads: 3/4 inch) With float type auto drain With drain guide Port size A B C D E F G H K L M N Model P 255 276 Q 241

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Cylinder with Lock

Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

3 @1 !4 !3 !8 !3 !4 @1 w !8 w !8 w !6 !5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !

SMC Pneumatic Clean Series

3 3 11.5 + Stroke 18 + Stroke 24 + Stroke A Built-in magnet [O] [Auto switch] [P] 16.5 + Stroke 23 + Stroke 29 + Stroke Rod end male thread Rod end nut / Accessory (Option) Rod end nut S X W V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Digital Flow Switches Series PF2A

DC (+) q 6 Red CH3_OUT1 5 Gray CH2_OUT1 4 White N.C. 3 Black CH1_OUT1 2 Blue DC() 1 Brown DC(+) DC () w CH1_OUT1 e N.C. r CH2_OUT1 t 2000 CH3_OUT1 y CH4_OUT1 u N.C. i Internal circuits and wiring examples PF2A200 PF2A201 DC (+) DC (+) 4 3 2 1 4 3 2 1 (Brown) (Brown) Sensor Sensor Sensor + Load Load Load Load + NC NC 24 VDC CH1_OUT1 CH1_OUT1 24 VDC (Black) (Black) 4 3 2 1 4 3 2 1 Load Load

Power Valve: Economy Valve Series VEX5

Disassembly 1) After loosening the screw q, then if the housing w is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull the screw q out of the housing w. 3) On the bottom part of the terminal block e, theres a cut-off part o.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Low Profile Guide Type

Static moment 3 = ME/MEmax Review M1E, M2E, M3E MEmax is the allowable moment at 3.

15

3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !