Parallel Opening/Closing Type Gripper, XRAY Series

XRAY-1250-100 XRAY-1250-100-POB XRAY-1250-200 XRAY-1250-200-POB Tandem XRAY1250-200 x-KIT-1250-100-COV XRAY-1250-100 x-KIT-1250-200-COV XRAY-1250-200 To Mount 6.5mm Prox. X-KIT-1250.I2MM To Mount 12mm Prox. X-KIT-1250-t8MM To Mount 1Smm Prox. The right to chnge designs and specifications without trolice is rcserved. All dat!

HRX-OM-Z015

Broken wire exceeded. o r Broken wire 60 sec. AL19 Communication alarm is generated.

LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

12 Red 12 E 2 phase stepper motor PD Yellow 11 F 8 5 phase stepper motor For a signal power supply of 24VDC, connect an external resistor R (1.3k 1/2W) in order to hold the current to 15mA or lower.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

AF800/900

Dimensions Option B (Without auto drain) Option/Dimensions Model Metal bowl Metal bow with level gauge Without drain cock Drain cock thread piping With drain guide AF800 AF900 409 489 440.5 520.5 393.5 473.5 410 490 406.5 486.5 B (With auto drain) A B C D N.O N.C E Model AF800 AF900 150 200 410 490 33 46 140 170 439 519 472 552 200 260 Precautions Be sure to read before handling.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

ARJ310

ARJF310F-01 y e !

Miniature Regulator Series ARJ310

ARJF310F-01 y e !

Model Selection 1

Before tightening VQ VX2 Nut VX Tubing support Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Tubing Insert bushing VX3 w e r VXA New PFA New PFA New PFA Series LQ 1 2 After tightening Quadruple sealing parts VN q LVC LVA Needle Valve Series LVN Needle Valve Series

PFxx-OMO0004CN

3.5 -0.25 -67No.PF-OMO0004CN-E A B C 1 V 1.04 V 5 V 4 mA 4.16 mA 20 mA PFMB7201 2 L/min 200 L/min -68No.PF-OMO0004CN-E -() [L/min] OUT ()( ) [kPa] IN 200kPa IN 400kPa [L/min] -69No.PF-OMO0004CN-E IN 3F.S.8cm IN OUT [%F.S.]

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

4 y r t !3 e i o w !0 !5 Lateral load resisting type: MQQL (Built-in ball bushing) !1 !6 !

Clean Regulator

300 100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

HRX-OM-O021

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Terminal block Recommended earth leakage breaker screw Recom Tightening Model Power supply Cable qty. x torque Rated Sensitivity Rated diameter mended voltage size voltag of leak current crimp e current [A] terminal [V] [mA] 3coresx12AWG 1-phase (3 cores 200-230V AC HRS050-A-20 200, x3.5mm2) (including 230 20 30 M4 5.5-4 1.5Nm

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.