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x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size

H:Distance from the cylinder center axis to the mounting surface for the table L MXY H dimension (mm) MXH6 MXH10 MXH16 MXH20 MTS 24.5 30.5 34.5 41.5 Cylinder shaft center m Load center of gravity Selection Graph z to c (Vertical Mounting) Graph c c Maximum Speed 500 mm/s or Less Graph z z Maximum Speed 100 mm/s or Less 1 100 10 Mass m (kg) Mass m (kg) 20 0.1 16 20 16 1 10 10 6 6 0.01 0.1

*Lead wire length symbols: 20in (0.5 m) . Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

L D d m t d H B C l IY-G04 IY-G05 C type 10 for shaft 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 C type 14 for shaft 10 14 -0.040 -0.076 -0.050 -0.093 9-12-19 20 Simple Joint: 32 to 63 Type A Mounting Bracket 2-D T1 T2 M W V U F B E (mm) Joint and Mounting Bracket (Type A, Type B) Part No.

Incremental type 14.5 mT 10.8 to 13.2 VDC (Ripple 1% or less) 40 mA 0.1 mm/pulse 0.2 mm Note) (at 20C) NPN open collector (35 VDC, 80 mA) A/B phase difference output 50 M or more (500 VDC measured via megohmmeter) (between case and 12E) 33.3 Hz, 2 hours at X, Y and 4 hours at Z JIS D 1601 as standard 30 G, 3 times at X, Y, Z IP50 (IEC standard) Extension cable (Option) 5 m, 10 m, 15 m, 20

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

300 L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 214 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5SA Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 28 G 58 (5.5) 10 5H9 +0.030

Filtration accuracy (m) 5 10 20 40 74 105 No.

m 2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12

Part no. m t Snap ring D d9 3 d l D d9 3 L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

Part no. m t Snap ring D d9 3 D d9 3 d l L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

C OU n + o Example Insedton ol reststor +24V G;,,* | "'/ + r OrfDrill R Input terminal(CP) ]l 7 l ( l n p u l i m p e d a n c e ) Lir Approx. 4.7 hA \ I 0v OV ?aSlft'ss lcturtol,s ftm $wilc[ Pmnrulions I Bo sffB m md [sfom lildlilU AWarning 1. Confirm specifications.

FD FG FL FX FZ M A A CD CL CU CW CX CZ RR T 32 40 50 63 59 65 148 5.8 11.2 6.6 52.5 30 112.4 57 72.5 71 5.5 69.5 8 48 56 65 34 139 161 10 151 14 20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 83.5 78 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 215.7 71 94 91 91 97 9 16.2 11 46 177.4

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1m, 3m, 5m Piping length: 1m, 3m, 5m : When the display value becomes 9 or lower, "0" is displayed. "0" and "10" are displayed near "10". This does not affect the performance.

Min. stroke with auto switch in the linear motion Additional symbol No. of auto switches Min. stroke (mm) 1 5 2 10 With air cushion on the linear motion part Without air cushion on the linear motion part C N Auto Switch Specifications/ Refer to p.2.11-1 for further information on auto switch single body. Standard Made to order Lead wire length (m) Load voltage Auto switch part no.

Manual override (Non-locking) 41.5 [48] 29.1 22.5 13 [ ] for AC L plug connector (L) M plug connector (M) 33.5 5 33.5 2.5 5 2.5 10 5 10 5 48.9 [50.2] 58.5 44.9 4-M5 X 0.8 (Lead wire length) (P/R port) 4-M5 X 0.8 (P/R port) 300 41.5 [48] 52.6 [59.1] 300 29.1 (Lead wire length) 41.5 [48] [ ] for AC Other dimensions are the same as the grommet.

IDX-OM-O004-B 2010 11 B2011 6 / Series IDF15E1-10 (-A,C,K,L,M,R,S,T) IDF15E1-20 (-A,C,K,L,M,R,T) URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ 2011 SMC CORPORATION All Rights Reserved.