CXWM/CXWL

For dimensions of 25 stroke, refer to page 8-26-28. 8-26-27 26 Series CXWM 25 With End Lock: CXWM2525 stroke R 2 x 2-M6 x 1.0 thread depth 12 +0.012 0 2 x 2-6H7 depth 8 2-M10 x 1.0 Adjusting bolt 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 4-5.5 through 4-9.5 counterbore depth 5.5 2-Rc 1/8 Cylinder port 2-Rc 1/8 Plug (R 1/8) (Cylinder port) 2-RB1006 shock absorber (Housing installed on single side

2/3 Port Valve

DIN connector: D Conduit terminal: T Measurement for connection Model Conduit terminal Electrical entry P Port size Rc(PT) Grommet Conduit DIN connector H F E D C B A Energized open Energized closed Q M L K J Q R T R R Q S S Q R 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 84 (91) 94 (104) 48 (55) 56 (66) 63 (73) , , , VX21l2 VX22l2 VX23l2 1 8 1 4 1 4 1 4 3 8 3

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

&snac

0 n e t o u c h f i t t i n s f o r P U r s e a i r e x h a u s t ( 0 P t i o n : P , P S ) F Y 2 0 s p a c e r I 7 E20t-01,02P i p i n s a d a p t 0 r7 i n o u t e r d l a m e t e r ( 2 0 0 ) ( 1 9 6 ) 0 p t i 0 n : P S ) ft r / 8 , 1 . / 4 N i p p l e 7 I / B : ( 7 7 ) t . / 4 : ( ' 1 3 N o t e : N 0 . 4 , N o . 7 , 6 : O n l Y 8 : O n l V t y p e t y p e M P r t s e I s p a r e a N O P

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ 0.45 0.6 (A) 4 VQD VZS 1 (P) 5 (R) Except for VQZ1000 N.O.

125

(R) e r Port 3 (R) Port 2 (A) Port 1 (P) Port 23(P2) (Pilot air port) y i Port 2(A) u r y Port 1(P) t q VEX3320 (Air operated) VEX3420 (Air operated) w e q r y y t w r e u t t 12(P1), 23(P2) Port Port 3(R) y y (Pilot air port) r i Port 2(A) u r Port 1(P) t q Port 1(P) Port 2(A) Port 3(R) Component Parts No.

42

-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF 73 12.5 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) 4(A) VVQ4000-R--02: 1/4 VVQ4000-R--03: 3/8 2(B) 3(R') 3(R2) 5(R1) Circuit diagram Plug-in

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

AC Servo Motor Driver (Pulse input type/Positioning type)

speed limit 6 [Applied] 500 r/min PC34 SC7 Internal speed limit 7 [Applied] 800 r/min 17 - 4.5 Positioning mode (1) [Basic settings parameters (No.PA)] No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

VM

1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

Flow Control Equipment

AS42l1F-04 AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

High Vacuum Angle Valve

5 Plate assembly (Maintenance parts)1 i Bellows holder (Material: Stainless steel 304) r Exterior seal (Maintenance part)1 u Bellows assembly (Maintenance parts)1 Port 3(R) (Exhaust port) (Including y, i) Bellows (Material: Stainless steel 316L) !

One-touch Fittings

Face seal fittings: R, NPT, G 1. Tighten fittings with sealant using the proper tightening torques in the table below. 2. Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2.

MY1

Applicable cylinder Port variations MY1B10 MY1H10 L R L L R R R Note 1) Note 1) R R R L L R L L L L R Slide table operating direction Note 1) These ports are not applicable to MY1H10.

KR

(mm) Connection thread R Model A M FR double layer L FR soft nylon KRH06-02S KRH06-01S 1 8 16 12 18.5 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 30 30 Reference dimensions after R thread installation. 15.5 17 1 4 17 10.4 14 27 21 19 26 19 14 17 6 5.6 Applicable tubing 3 8 1 8 KRH06-03S 24 26.1 KRH08-01S KRH08-02S KRH08-03S KRH10-01S KRH10-02S KRH10-03S 14 1 4 3 8 1 8 1 4 3 8 20.5 15.5 26 27.5