CJ2

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting nut S + Stroke H + Stroke 2-LC Mounting hole Z + 2 x Stroke With air cushion: CJ2WL A Bore size Stroke Mounting nut Rod end nut Piping port 2-M5 x 0.8 Cover surface S + Stroke Z + 2 x Stroke Rod End Nut Material: Iron Applicable bore (mm) B C d H Part no.

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

REA/REB

type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Sine rodless cylinder Series REA/REB Maximum speed (300 mm/s) sensitive workpieces Allows rapid transfer of impact Maximum speed (600 mm/s) m/s 2 or less (REA) or 15 m/s 2 or less (REB) Throughput dramatically

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

Series VQ Base Mounted Metal Seal/Rubber Seal

](2) EX120-SFU1(-XP)(1) [EX123-SFU1](2) SX EX120-SDN1 [EX124-SDN1](2) EX120-SCS1(-XP)(1) [EX124-SCS1](2) VK EX120-SCS2(-XP)(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

SMC Basic Pneumatics

per square mtr Newton Earth acceleration m I m2 mt m s'' s ' m s-2 m2 kg N a,F,1-6,e.p A,S v v a) J F G = kg ' rn's'2 9.80665 m's-2 N Impulse Ns Newton Second w E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Table of Contents

S D Single Double How to Order Sub-plate VS7 2 A03 Specifications Thread type Port size Porting specifications Rc Nil A03 A04 A06 B03 B04 B06 Side ported Rc 3/8 Side ported Rc 1/2 Side ported Rc 3/4 Bottom ported Rc 3/8 Bottom ported Rc 1/2 Bottom ported Rc 3/4 Model Weight (kg) NPTF T G F Piping location Port size VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04 VS7-2-B06 3/8 1/2 3/4 3/

%silltr

per square mtr Newton Earth acceleration m I m2 mt m s'' s ' m s-2 m2 kg N a,F,1-6,e.p A,S v v a) J F G = kg ' rn's'2 9.80665 m's-2 N Impulse Ns Newton Second w E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.

Hydraulic

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

JXCx-OMU0004

LEFS 16,25,32 16A 16B 25H 25A 25B [mm/s] 60 30 2] 1000 [mm/s [mm/s] 48 10 5 20 12 6 2] 1000 [mm/s [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B [mm/s] 30 2] 1000 [mm/s [mm/s] 24 16 8 30 20 10 2] 1000 [mm/s [mm] 1 LEF 7 LED f 50 No.JXC-OMU0004-A LEFB LEFB16 LEFB25 LEFB32 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 48 200 48 200 48 200 1 60 300 60 300 60 300 2 70 400 70 400 70 400 3 80

LJ1H

(B contact) 2 pcs.

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

2 Phase Stepper Motor/Without Motor Brake Series LXS

Refer to page 302 for acceleration time. 281 Series LXS High Rigidity Slide Table Type CE Marking With Motor Brake/Without Motor Brake How to Order LX S H 2 S 1 S B 100 F9N Q B CE marking Slide table type Actuator configuration S Number of auto switches Direct acting guide Guide type 1 pc. 2 pcs. 1 2 H 6 pcs. 6 Motor type CE marking 2 5 2 phase stepper motor 5 phase stepper motor Contact

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

Speed Controller with Indicator

1F 0 U01 S 06 2 Applicable tubing O.D.

V100

S Z Nil 14 1 2 1 20 2 Indicator light is not available for grommet type.

I

(V) 5 1.5 0.7 3 2.5 1.3 AC125 0.1 AC250 0.8 1.5 2 0.5 1 3 DC30 4 2 3 3 0.1 DC125 0.05 0.4 0.05 0.4 Insulation Resistance 100 M@ 500V (DC) *High Inrush Circuits D I M E N S I O N S P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 H O W T O O R D E R P N E U M AT I C P R E S S U R E S W I T C H: S E R I E S IS3000 IS3 0 C O N N E C T I O N L A M P 0 Rc(PT) 1/ 4 1 Flange No

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time