ISA2

ZSP ISA2 Selection IS Caution ZSM 1. Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element.

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

VCA

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF. Warning 1. Cannot be used as an emergency shutoff valve, etc.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 10 M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Title not found

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1 6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

RB/RBL/RBQ

t = 25C m 2 1 2 m 2 1 2 R Operating condition Impacting object weight Collision speed Dropping height Angle speed Distance between axis of cylinder and impact point Bore size Cylinder operation pressure Thrust Torque Operation cycle Ambient temperature Friction coefficient Symbol m h r d p F T n t Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh m RHC R m 2 1 2 m 2 1 2 1 2 T S

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

Air Cylinder NCM Series Stainless Steel Cylinders

Cushion standard on 76 and l/a bore onlv {must include C if desired on these bore sizes). ultENstoNs r":-t _1-1,--lY+/ 075 {!a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Note 1) The chart above shows the leakage test results based on a test conducted using this cylinder construction. a t e l u g c Reduced initial particulate generation e i t 3 n r a e p r a Note 2) To allow fine stroke adjustments, O-ring seals are installed to separate vacuum and atmosphere.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

o n ti ti e g a n o a r ti a a e t n 1 t t o o g o 0 1 r e Key r r 0 9 y 2 y y 0 e 8 e e +4 0 K 0 K K +4 0 +4 0 +4 0 0 Key Key 0 (40) 1 Key e g n a r n o ti a t o r y (85) e (40) K (40) A port B port A port B port A port B port A port B port 4 Series CRB1 With Auto Switches Applicable auto switches Auto switch model Electrical entry Indicator light (lights when ON) Yes D-R73 Grommet

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Part 1: General requirements) ISO 10218-1: Manipulating industrial robots Safety. etc. Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury.

IDG

Port size: Rc 1/8, 1/4 (NPT, G threads are not available.)

rep-modular-e

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !