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32 L 250 290 LD 11 14 LH 57 65 LL 87 100 LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 Bore size (mm) 50 63 SS 10 13 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42 Q 380 436 QQ 28 30 QW 90 110 RR 35 49 TT 35 43 UU 24 28 VV 28 30 W 200 236 WW 22 25 YW 128 152 Z 424 490 Bore size (mm) 50 63 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these

VDW1: VDW10S-12A-1 VDW2: VDW20S-12A-1 M U Y W X 11 Size 39 VDW1 VDW2 11 28 17 34 15 33 20 14 Enter symbols in the order to the right when ordering a combination of electrical option, other options, and bracket interchangeable with old type. Example) VDW Z Z 1A XB 2 0 A Electrical option Bracket interchangeable with old type Other option Construction Normally closed (N.C.)

(Manifold specification sheet on page 28.)

1.5 125 125 B12 M12 x 1.75 B16 M16 x 1.5 Pad type Material HB Large bellows pad N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-86 5 Series ZPT Vacuum Pad: Large Size Bellows Type Vertical Vacuum Entry without Buffer 63 80 63 80 ZPT HB-A14 (Male thread) ZPT HB-B (Female thread) M14 x 1 Rc 1/8 Hexagon width across flats 19 5 5 25 Hexagon width across flats 19 G 28

28 Counter CEU5 Wiring with External Equipment 1.

E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11 100 20 25 98 28

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28

Load voltage 24 VDC,100 VAC 24 VDC (10 to 28V) 28 VDC or less Load current range Indicator light 5 to 40mA, 5 to 20mA 5 to 40mA 40mA or less D-Z73 D-Y59B D-Y59A Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment 2-wire type 3-wire type Solid

Allowable kinetic energy (mJ) Adjustable rotation time range that ensures stable operation (s/90) Size 32 40 0.2 to 1 23 0.2 to 1 28 Formula of moment of inertia is subject to load shape. Refer to the moment of inertia formula on page 11-10-3. 2.

28 Counter CEU5 Wiring with External Equipment 1.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Allowable temperature range (C) 10 to 80 Effective atmosphere Non-water soluble cutting oil 4.22 4.22 8.73 11.57 22.16 8.73 Extended Spring force (N) 6.18 6.86 14.61 17.65 38.05 14.12 Retracted 26 26 70 150 365 70 Basic type With cap Weight (g) 28 28

DCXT12/16 CXT20/25 CXT32 CXT40 -X 26 mm (One side 13 mm) 28 mm (One side 14 mm) 44 mm (One side 22 mm) 40 mm Stroke adjustment range 20(One side 20 mm) Data For detailed specifications about shock absorber, /refer to page 10-22-1 of Best Pneumatic Vol.10. Shock Absorber Specifications Made to Order Specifications (For details, refer to page 8-31-1.)

Applicable series MGQM Slide bearing MGQL Ball bushing bearing 12, 16, 20, 25, 32 40, 50, 63, 80, 100 Bore size (mm) Bearing type How to Order D By-pass port dia. 20 M Stroke Bore size MGQ Bearing type Slide bearing Ball bushing bearing M L D (mm) MGQL 8 10 12 15 18 18 22 22 28 33 Bore size (mm) A (mm) B (mm) C (mm) Hexagon socket head cap screw Copper-free MGQM 10 12 14 18 22 22 27 27 31

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

*2P7t *3P.26 7-3-6 28 ( / MIN50m sec(*2) + + (*1) (*1) END (*1) ) )END *10.2secMax. *2P.26 7-3-6 29 ( / MIN50m sec(*2) + + (*1) (*1) END (*1) () ) RUN *10.2secmax.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

bracket Aluminum alloy Anodized 9 Housing B Aluminum die-casted Coating 10 Bearing holder Aluminum alloy 24 Auto switch mounting bracket fixing bolt Carbon steel Chromating 11 Return plate Aluminum die-casted Coating 12 Pulley Aluminum alloy 25 Magnet 13 Pulley Aluminum alloy 26 Magnet holder Stainless steel 14 Belt 27 Roller shaft Stainless steel 15 Cover plate Aluminum alloy Anodized 28

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15