IR1000/2000/3000

(kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 100 0 20 40 60 80 100 120 57.0 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV3000 IRV3000 0 53.0 10 53.5 20 54.0 SET side pressure (kPa) 30 Set pressure (kPa) 54.5 40 55.0 50 Set point 60 55.5 70 56.0 80 56.5 90 57.0 100 95 90 85 80 75 70 65 60 100 0 20 40 60 80 100 120 140 160

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

11.4 5.2 16.4 27 10 23 16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043

AIR CYLINDER

Auto switch precautions P.30 1) Applicable auto switches P.30 2) Precautions for use P.32 -1- 3A 3/5 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Ozone Resistant

220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves

Suction cups with flange

TQ1230001-OM107 ModelZPG16J-7A-X2 ModelZPG(B25,B30)J-7A-X2 (Suction cup formMultistage bellows type 2.5-Stage) (Suction cup formMultistage bellows type 3.5-Stage) Dimensions Model A B D E F G H ZPGB25J-7A-X2 25 26 27 10.2 32.5 48 52.5 ZPGB30J-7A-X2 30 33 32 13.8 38 54.5 59 Note1) D and (st) indicate the reference value during gripping at vacuum pressure: -85[kPa]. -13No.

PFA/PFW

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting in the following formula. f = k x v f: Frequency of vortexes, v: Flow velocity, k: Proportional constant (determined by the vortex generator's dimensions, shape, etc.) Therefore, the flow rate can be measured by detecting this frequency.

Series SYJA300 3 Port Air Operated Valve

Note) Model number for base mounted style without sub-plate is SYJA5 2 and SYJA7 2. 1 2 1 2 Body ported Series SYJA500 With Bracket Model No. of air operated valve SYJA5 2-M5-F, SYJA7 2-01-F 1 2 1 2 Note) Bracket is not assembled.

Process Valve

A F FKM EPR 32 to 50 come in valve element assembly 4 material Pilot solenoid valve SF4--23 (Refer to the table below.)

ISE70_71-AB.eng

Item Default setting Item Default setting [F80] Power saving mode OFF [F 3] Digital filter setting 0.00 ms Bracket B [F81] Security code OFF [F 4] Auto-preset function OFF Press the SET button for 3 and 5 sec. Press the SET button for 1 and 3 sec. Press the SET button once.

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

HRX-OM-W069

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

PC Wiring System Series PCW

8 6 4 2 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 Input/output connector (CS0) 3 7 5 1 39 37 35 33 31 29 27 25 23 21 19 17 15 13 11 9 Power supply terminal block 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS1) 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Series MHR2 11222 Finger Rotary Actuated Air Gripper Size: 10, 15, 20, 30 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.

Precision Regulator

Pressure gauge is shipped together, but not assembled. 811 IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic

Swivels

-30 to 180 F Performance Data 90 PS Swivel 150 SUS Oil Flow vs.

SYA3000/5000/7000

(49.5) (42.5) 30 24.5 28 15 89.2 Manual override 39.4 1.8 (Breathing hole) 1/4 (P port) 1.2 0.9 2 (23.9) 18 (5.5) 47.6 12.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

CRQ2

(800) 258-9200-www.stevenengineering.com CRA1 With double shaft DD W D CRQ2 I K Auto switch MSQ b (10) Max. 2Rc 1/8 (Port size) H F MRQ (US) (UW) DCB Q BC 20M N BB BA BA G D A (AU)Max S L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) Rotating angle A AU B BA BB Size BE J JA JB BC BD BU CA CB F H 90, 180 90, 180 40 90, 180 20 30 10 12 15 8.3 32 30 32 36 M8 x 1.25