Series 12-REA Sine rodless cylinder Special tool F Special tool part number list Applicable bore size (mm) 6, 10, 15, 20 25, 32, 40 50 63 Part no. CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism. Contact SMC when disassembly or maintenance is necessary . 169
Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,
(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.
N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
Actuator effective torque STa (S is 10 times or more) (Example) (Example) F: Pressing force (N) Friction coefficient Accelerating torque calculation Ta = I (Nm) Static torque calculation Weight m F = mg Ts = F x l (Nm) I : Moment of inertia Static torque calculation Movement Refer to page 11.
220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves
N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
F H Port size G E E Center of F.R.L. body Center of F.R.L. body B B C D A Part no. Note) Port size A B D E30003-A 3/8 31.8 30 30 E40004-A 1/2 31.8 36 36 Seal A (Spacer width) Note) in part numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. Separate interfaces are required for modular unit. Part no.
Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
140.5 LVR50-V19 22 80 120 169 C F E Breathing port M5 x 0.8 J Tube extensions 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Breathing port M5 x 0.8 Model A B C D E LVR20-T07(06) 40 40 49.3 68 20.1 LVR40-T11(10) 82.5 82.5 89 115 33 IN C F Model F G H J K LVR20-T07(06) 8 27 56 33.5 126.2 LVR40-T11(10) 14 64.5 100 40 183.3 E K J J Breathing port M5 x 0.8 5 Applicable Fluids Regulator
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20
Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless
-www.stevenengineering.com Material: Rolled steel F pin dia.
entry hole: G1/2 LQ LVN Manual override (Non-locking) TI/ TIL Pilot port PA PAX PB Main port Main port Rc Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry
Holding Force Holding force (N) 25 32 40 50 63 363 588 922 1471 2256 Bore size (mm) 861 A Sine Rodless Cylinder 12-REA Dimensions 12-REA25/32/40 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.