Clean Series: Relief Type, Magnet: Built-in, Mounting: Head Side Flange, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 150mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 20mm, Stroke: 150mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: None, Mounting: Basic Style, Cushion: Rubber Bumper, Bore Size: 25mm, Stroke: 150mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: Built-in, Mounting: Basic Style, Cushion: Air Cushion, Bore Size: 40mm, Stroke: 150mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: Built-in, Bore Size: 25mm, Stroke: 150mm, Port Thread: Male Rod End, Auto Switch: -, Lead Wire or Prewired Connector: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Single Foot Style, Bore Size: 10mm, Stroke: 150mm, Cushion: -, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: Relief Type, Magnet: None, Series: J2, Mounting: Basic Style, Bore Size: 16mm, Stroke: 150mm, Cushion: -, Head Cover Port Location: -, Version: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Type: -

Clean Series: 10 (Relief Type), Magnet: D (Built-in), Series: A2 (Standard), Mounting: L (Axial Foot), Bore Size: 50mm, Port Thread: Rc, Stroke: 150mm

Auto Switch Guide

D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31 10-20-32 Grommet 10-20-33 Rail 10-20-34 Connector 10-20-35 Grommet Tie-rod 10-20-36 Terminal conduit 10-20-37 10-20-40 10-20-38 10-20-41 Grommet

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

CRQ2

, 15, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

Thermo-chiller/Rack Mount Type

Applicable model HRR012/018--10-T/MT*1 HRR012/018/024/030--20-T HRR012/018/024/030--20-MT1 Pump Rated flow (50/60 Hz)2, 3 L/min 7 (0.36 MPa)/10 (0.42 MPa) 10 (0.42 MPa)/14 (0.40 MPa) 10 (0.32 MPa)/14 (0.32 MPa) Maximum pump head (50/60 Hz) m 50 50 50 Output W 350 550 Circuit protector A 15 15 (10 A for standard) Recommended earth leakage breaker capacity A 15 Cooling capacity4 W The cooling

Solid State Auto Switches

(Red Green Red) D-M5NW D-M5PW D-M5BW Auto switch model Wiring type 3-wire 2-wire Output type PNP NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 5 to 40 mA 80

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

Auto Switch Guide

Contact protection box CD-P11 MLGP LED Brown OUT Brown Choke coil Resistor RLQ Reed switch Zener diode Surge absorber MLU OUT Blue Blue Weight ML1C (g) D-A73 DD-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 -X Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor 20Reed switch Zener diode Dimensions Data OUT () Blue Blue Indicator

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

HRX-OM-X037

.Communication setting screen 36.Contact output 46 Setting screen 10.

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

Auto Switch Guide

Contact protection box CD-P11 C76 LED Brown OUT Brown Choke coil Resistor C85 Reed switch Zener diode Surge absorber C95 OUT Blue Blue Weight CP95 (g) D-A73 NCM D-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 NCA Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor DReed switch Zener diode Dimensions -X OUT () Blue Blue 20Indicator