Rotary Table

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

JXCx-OMT0061CN

5.4 CN5: . 20 6.

CYP

CAT.ES20-148 A Clean Room Rodless Cylinder Series CYP 15, 32 Magnetically coupled rodless cylinder for transfer in clean environments Low particle generation: 1/20 Long strokes (Max. 700mm) (compared to previous series) High cleanliness is achieved with non-contact construction of the cylinder tube exterior and a stainless steel linear guide (specially treated).

CYPSeries

N333 Clean Room Rodless Cylinder CYPSeries 15, 32 Magnetically Coupled Cylinder w/Guide Shock-Free Cushioning Structure Low Particulate Generation Cleaned, Assembled & Double Packaged in a Clean Room A Low particle generation: 1/20 Long strokes (Max. 700mm) (compared to previous series) P High cleanliness is achieved with non-contact construction of the cylinder tube exterior and a stainless

CYPSeries

N333 Clean Room Rodless Cylinder CYPSeries 15, 32 Magnetically Coupled Cylinder w/Guide Shock-Free Cushioning Structure Low Particulate Generation Cleaned, Assembled & Double Packaged in a Clean Room A Low particle generation: 1/20 Long strokes (Max. 700mm) (compared to previous series) P High cleanliness is achieved with non-contact construction of the cylinder tube exterior and a stainless

Low Maintenance Filter Series FN1

20 05 05 -0 S0 S0 S0 0S 00080 N-1 N-1 80 N-1 -1 1N 101 101 101 110 FN1 FN1 FN1 FN Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90 Particle diameter (m) Particle diameter (m) 3 Low Maintenance Filter Series FN1 Blocking Characteristics (Repeatability Characteristics) Fluid: Potable water Supply pressure: 0.2MPa Flow rate: 20l/min Test

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VNB

A: Non-locking extended type 4 Valve size 1 to 4 6A 8A 10A 1 8 1 4 3 8 5 6 24 VDC 12 VDC 1 7 B: Locking slotted type 7 240 VAC 50/60 Hz 9 Other 11 15 11 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 Nil: Non-locking push type 20A 3 4 Valve size 5 to 7 25 4 25A 1 22 11 4 32A 5 32 Electrical entry/ With light/surge voltage suppressor 1 B 22 32 28 40 6 28 40 1 4 32F Flange 11 2 40A GS Grommet

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

NCY2 series

Connector Grommel Solid slale Reed switch/Rail mount type 200vAc 5 1 0 Relay, Sequence controller 24VDC 5^40 '100vAc 5 -20 , r } , t r r r , 2+v B!

Unique air cushion construction with no cushion ring, Wide size variations from °20 to °100, Nearly three times the allowable kinetic energy, Improved noise reduction * and repeatability, Interchangeable mounting, Cylinder, 3-Position, 3-POSITION CYLINDER, 1.12 lb

Bearing Style: Slide Bearing, Bore Size: 100mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 180° Rotation, No Detector Arms, No Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Ball Bushing Bearing, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Table Turn Position: 180° Rotation, No Detector Arms, No Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Bearing Style: Ball Bushing Bearing, Bore Size: 63mm, Port Thread: NPT, Stroke: 75mm, Table Turn Position: 180° Rotation, No Detector Arms, No Switch Bracket, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Table Auto Switch: -, Table Switch Lead Wire or Prewired Connector: -, Table Switch Number: -

Mounting: L (Foot), Bore Size: 32mm, Thread: TF (G Thread), Full Stroke: 75mm, First Stroke: 20mm

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75/20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Both

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 75/20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Both

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 75/20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Both

Mounting: A (Both Ends Tapped), Bore Size: 32mm, Thread: Rc, Full Stroke: 75mm, First Stroke: 20mm