Precision Clean Regulator Series SRP

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate l/min (ANR) Flow rate l/min (ANR)

10

1/RJ20 70 140 20 RJ2015L RJ2725L RJ1412L 60 120 Impact mass m [kg] Impact mass m [kg] Impact mass m [kg] 15 100 50 RJ2725H RJ1412H 80 40 RJ2015H 10 60 30 RJ1410 40 20 5 20 10 0 0 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 500 1000 1500 Collision speed [mm/s] Collision speed [mm/s] Collision speed [mm/s] 882 Model Selection RJ Series Model Selection Graph The model selection graphs

Precision Clean Regulator

140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to

Load Mass (Horizontal Mounting)(kg): 120~150.1, Table Size Length L(mm): 200, Table Material: [Aluminum] Aluminum Alloy, Rodless Cylinder Joint Type: Mechanically Jointed, Guide: [Sliding Guide] Guide Type of Slide Bearing, Table Size Width W(mm): 144, Table Size Height H(mm): 107, Table Parallelism(µm): 120, Table Surface Treatment: [Anodize] Hard Anodize, Operating Pressure(MPa): 0.15 to