EXxx-OMN0027CN

Device diag. + (70 ) 2 (Diag.mode) Device + Module diag. ++ Device + Module + Channel diag. +++ -52No.EX-OMN0027CN-D SI No. (H.T.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

NVZseies

N213 aOSilrtr 3 way.3 port sotenoid vatve NVZseies Rubber Seal Model 100/300/500 Low Power Consumption 1.8 WDC Compact Size, Large Flow Capacity Cv 0.05 0.5 High Speed Response Time -15 mSec (NVZ 100) Built-in One-Touch Fitting Manifolds Avaihbb Individual or Manifold Mounting Variat ions of C L Kl tmrn"..

AR20-B to AR60-B

2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

AR20-B to AR60-B

2.3 35.5 42.5 21 7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed

With Factory Installed

D.8 AR4001 1/4 3/8 1/2 70 149.5 37.5 70 38 50 54 54 8.5 10.5 70 2.3 4 ~ Dimensionwameans from port center to eccentric direction of gauge center. Modular Type Filter I Regulator with Built-in Pressure Gaug. AW200 1-300 1-400 1 Standard S ecifications Model AW2001 AW3001 AW4001 Port size 1/8,1/4 1/4,3/8 1/4,3/8,1/2 Proof pressure 1.5MPa !

VHK

22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 22 46 78.2 30.5 47.7 80.2 31.5 48.7 21.5 4 20.8 21.8 14 3.2 72 70 22 70 72 10 12 VHK-B2A 49 17

VK300

Terminal screw (3 positions) Tightening torque 0.2 to 0.25 Nm Housing (Position for light mounting) Terminal block Slot area Grommet type Red (+) Black () Connector part no.: VK300-82-1 Part no. of connector with indicator light Surge voltage suppressor Rated voltage Voltage symbol 100 VAC 100V Part no.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (l/min (ANR)) Inlet pressure (MPa) 7 Direct Operated Precision Regulator/Modular Style Series ARP20/30/40 Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

Table of Contents

Series AKH/AKB Check Valve with One-touch Fitting. 92 92 92 93 94 95 95 95 95 97 99 100 100 100 101 102 103 103 104 105 106 107 107 107 108 109 110 110 111 112 113 114 114 114 115 115 116 116 116 116 117 117 118 118 118 119 119 120 120 122 123 124 124 124 124 125 125 126 Features. Series AKH/AKB Check Valve with One-touch Fitting. How to Order. Specifications. Dimensions . Construction.

VK300

Terminal screw (3 positions) Tightening torque 0.2 to 0.25 Nm Housing (Position for light mounting) Terminal block Slot area Surge voltage suppressor Red (+) Black () Connector part no.: VK300-82-1 Part no. of connector with indicator light Rated voltage Voltage symbol 100 VAC 100V Part no.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 A1 A2 A3 LW06 LW2 LD4 LD8 100 VAC 200 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC 4-13-3 4 For details about the applicable products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 How to Order Valves Electrical entry

IC

VY1 Resistance Vibration resistance 10 to 55 Hz at whichever is smailer of 1.5 mm amplitude X, Y, Z directions for 2 hrs. each Impact resistance 100 m/s2 (approx. 10 G) X, Y, Z direction G Water resistance Only display unit with cover is equivalent to IP65. It is equivalent IP40 without cover.

ZSE40/ISE40

Note 2) Fixed unit For vacuum/compound pressure: kPa For positive pressure: MPa 70 Option Note When equipped with auto shift function, the following ranges can be set.

Series VCL

22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

25 4 x M8 x 1.25 Effective thread depth 12 NA CC0.1 ZZ + Stroke S + Stroke W K 25 2 TF TN Nil P (Piping port) R Model L K I D B CC ZZ X W S NA Q V 300.007 0.037 100 12-REA50 M8 x 1.25 32 58 55 180 G1/4 86 52.4 25 110 27.5 176 60 60 Rc1/4 NPT1/4 320.007 0.043 12-REA63 M10 x 1.5 38 65.4 72 26 122 69 34.5 188 70 70 192 Rc1/4 NPT1/4 G1/4 862 A Specific Product Precautions Be sure to read this

Series 12-REA Sine rodless cylinder

110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x 11.5 M12 x 1.25 x 7.5 192 180 0 26 25 0 32-0.039 167 Specific Product Precautions Be sure to read before handling. 12-CY1B/3B/1R/3R/REA.

Series H, DL, L, LL Self-align Fittings

M L 8 6 4 DT04-00 32 DT06-00 10 10 10 12 15 16 5.7 14 23.5 23.5 36 DT08-00 47 12 14 25 16 24.5 10 12 DT10-00 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female union: DHF Applicable tube O.D. (mm) Effective orifice (mm 2) Weight (g) H2 (Hex.) Part No. H1 (Hex.)

Drain Separator for Vacuum Series AMJ 1

10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5