3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

AC Servo Motor Driver (CC-Link Type)

The guideline is 80% or less. 0 to 100 % 12 Effective load ratio The continuous effective load current is displayed. The effective value is displayed relative to the rated current of 100%. 0 to 300 % 13 Peak load ratio The maximum torque is displayed.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2650 32 MIS32-32D Single finger type: MIS (mm) 62 10 MIS8-10D J 2 3 Bore size Stroke 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 130 10 MIS12-10D D10, 20, 30 mm 3 5 160 20 MIS12-20D 10, 20, 30 mm -X 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

2650 32 MIS32-32D Single finger type: MIS (mm) 62 10 MIS8-10D J 2 3 Bore size Stroke 80 20 MIS8-20D 8 12 20 25 32 10, 20 mm 130 10 MIS12-10D D10, 20, 30 mm 3 5 160 20 MIS12-20D 10, 20, 30 mm -X 30, 50 mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9

Thermo-chiller

Make-up water Current (% of rated current) HRLE050 Item Unit Standard value Influence 4 h 2 h Corrosion Scale generation 1 h pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100*1 to 300*1 v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 30 min 20 min 14 min 10 min Standard item 6 min 4 min Acid consumption amount (at pH4.8) [mg/L] 50

Compact End Lock Cylinder Series CBQ2

Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W

MX-OMP0051

16.5 16.1 8.1 8.1 16.1 16.1 35.1 35.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 22 16 16 23 23 29 48 48 MXQ20(A) 32.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 21.2 22.9 23.9 23.9 23.9 29.9 38.9 63.9 63.9 63.9 MXQ25(A) 34.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4

SQ1000/2000

CAT.ES11-79 A 5 Port Solenoid Valve Series SQ1000/2000 SQ2000 Plug lead SQ2000 Plug-in SQ1000 Plug-in SQ1000 Plug lead Low profile compact manifold Compact with high capacity Pressure: 0.5MPa/Load factor: 50% Cylinder bore size (mm) Cv factor Series CJ2 Base mounted (with sub-plate) Cylinder speed (mm/s) Series CM2 Series MB/CA1 Rubber seal Metal seal 40 32 40 50 63 80 100 20 25 32 16 6 10

PFxx-OMS0001CN

2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1 42 [F10] [ SUb] [ oUt] 43 [F20] [ inP] 3 [REACUM] 47 4 [ oFF] OFF 48 [F22] [ FrE] [F30] [SAvE] [ oFF] 49 [ PoS] [ HoR] 50 [ PrS] [ Mid] 0.4 MPa0.6 MPa [F31] [F80] [ dSP] OFF [ oN]ON 51 [F81] [ Pin] [ oFF] 52 [F82] [LinE] [*] 53 [F90

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

40 0.02 0.01 63 80 100 Standard Stroke Table Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit No. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

Modular F.R.L. Unit

5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84

Trimmer Auto Switch

(mm) Description/Series Bore size 10 16 20 25 32 40 50 63 80 100 125 Parallel style MHZ2 3.0 5.5 6.5 8.0 7.5 Parallel style MHZJ2 3.0 5.5 6.5 Parallel style MHS2 (2 fingers) 4.0 4.0 * Parallel style MHS3 (3 fingers) 5.0 4.0 * Parallel style MHS4 (4 fingers) 5.0 3.0 * Air Cylinders (mm) Description/Series Bore size 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Compact cylinder

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

60 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN terminal.