ARM10/11

100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

ARM10/11

100 150 200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200

Model Selection 1

10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Coolant Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual override 7 7 Non-locking push type Non-locking push type A (projecting) Nil Semi-standard For other rated voltages, please

VXR21/22/23

AC VXR21 DC 50 45 20 60 40 15 AC VXR22 DC 50 60 25 60 50 20 AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature oil (2) High temperature water (2) (D) (D) 80 80 AC DC AC/DC 60 40 1 60 40 40 60 Maximum Minimum 10 5 (1) Note 1) 50 cSt or less Note

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

Series MXP Precision Air Slide Table

A A F F A F L L L 1 N = 0.2248 lbf 6 6 6 L=80mm L=80mm L=80mm 0.05 0.06 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.04 MXPJ6-5 MXPJ6-10 MXPJ6-5 MXPJ6-10 0.05 0.04 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 40 10 10 10 L=100mm

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100

70pvvna

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C.

Title not found

ble acting Single rod o12, o16/5to30 o20, o2t5 io 50 o32, @40l5lo 1N o50, 063/10 io 1m Double rod 612, E1U5lo 30 amlo @Q/5to50 o50, 0631 0 to 50 Large bor lize Double acting Single rod101o 300 Double rod 10 to 300 Standard Double acting Single @d o12. a16/5 lo 3A o20 p2t510 50 o32, o40l5 to 1 00 o50 to o10cy10 to 100 Double rod 012, 016/510 30 a20. o25/5 lo 5A 632, 64US lo 1OA o50 lo 0100

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Refer to back page 50 for Safety Instructions, pages 543 to 546 for Flow Control Equipment Precautions, and pages 573 to 575 for Specific Product Precautions. Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

MHF2

L L H Holding point Holding point H MHF2-12D MHF2-8D 80 50 Pressure 0.2MPa 40 60 0.5MPa 0.5MPa Pressure 0.2MPa 0.6MPa 0.6MPa Overhang Hmm Overhang Hmm 0.7MPa 30 0.7MPa 0.3MPa 0.3MPa 40 0.4MPa 0.4MPa 20 20 10 40 20 80 60 40 20 0 0 50 30 10 Gripping point L mm Gripping point L mm MHF2-20D MHF2-16D 100 0.5MPa 100 Pressure 0.2MPa Pressure 0.2MPa 80 0.5MPa 0.6MPa 80 0.6MPa Overhang Hmm Overhang

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

Process Pump Series PA3000/5000/PAX1000 Series PB1000

50 SUP=0.5MPa SUP=0.5MPa Total lifting range m Total lifting range m 40 40 Air consumption 100l/min (ANR) 30 Air consumption 200l/min ANR) 30 Air consumption 100l/min (ANR) Air consumption 50l/min (ANR) 20 20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

Multi-Axis Step Motor Controller

This control is not for synchronizing the position of the main axis and slave axis. 10 10 Current position Current position Origin 0 0 Origin 10 20 30 40 50 Axis 1 10 20 30 40 50 Axis 1 For 3 Axes JXC92 Series For 4 Axes JXC73/83/93 Series p. 3 p. 4, 5 VParallel I/O/ V Type V Width: Approx. 38% reduction Type V Width: Approx. 18% reduction 78 47 mm shorter 140 30 mm shorter JXC73/83 JXC92