SMC Corporation of America
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(To set 36.3 Secondary (psig) Precautions 30 Be sure to read before handling.

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

SW3 SW3 CM()SM() Table 10-29 SW3 Bit 1 Bit 2 OFF OFF SM (Safety mode) ON OFF OFF ON ON ON CM (Commissioning mode) SW3 DIP SMGSDML(Step7/TIA)/FDCML(PCWorx)Safe digital I/O (SM)CMSafe digital I/O (CM) 8.1.1 GSD CM1byte CM CM Table10-30, 10-31, 10-32 SM CM IO Table 10-30 COMNG_MODE I/O Byte 0 CN0-3 Zone M,Zone1-3 Byte 0 of COMNG_MODE Table 10-31 COMNG_MODE Bit 0 0 Zone M

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

, R2 port 31 31 : 3 position ( ): Rc3/8 1.11-6 Single Unit Series VQ4000 Base Mounted Plug Lead Grommet G H 2 position single: VQ415 l 0 1 155.5 155.5 105.5 42.5 23.5 23.5 50 105.5 42.5 50 11 (B port) 11 (A port) Indicator light (12.5) (12.5) SY 5 3 4 2 SYJ 9 38 48 A B 38 24.6 10.5 48 11 1 A SX 4 2 3 5 1 14 12 13.5 13.5 30 45 25.6 Mounting hole 30 45 VK Manual override 25.6 Mounting hole

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 Mounting 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 Mounting 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

Open the inner package of double packaging in a clean room or other clean environment. 12 to 14 R 1/4 22 to 24 R 3/8 28 to 30 R 1/2 3. Tightening tools Tighten with an appropriate wrench using the hexagon wrench flats on the body. Position the wrench on the base as close as possible to the threads.

90o 180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 42 52 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 56 65 Two mounting screws (for mounting

ISA3-H Piping length: 1m, 3m, 5m : When the display value becomes 29 or lower, "0" is displayed. "0" and "30" are displayed near "30".

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

VQZ100/200/300 Body Ported How to Order Valve VQZ200/300 VQZ 2 1 2 5 M C6 Series 2 3 VQZ200 Body width15mm VQZ300 Body width18mm Bracket F None With bracket SY SYJ Configuration VK Port size {2(A)port} (A) 2 N.C.