HRX-OM-Q026

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release Fan Breaker Trip alarm . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and

C95

6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

CNG

26 16 26 11 7 12 8 47 301 to 800 301 to 800 (mm) Bore size (mm) 20 25 32 40 P K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 141 (149) 117 (125) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10

Slide Unit Series CX2/CXWM/CXWL

Note 2) 2 magnets for auto switches are equipped to the magnet mounting block. 516 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL Operating Range (mm) Auto switch model Applicable cylinder size 10 16 20 25 32 Housing mounting D-A7/A80 D-A7H/A80H D-A73C/A80C 6 6 6 6 Plate mounting 6 D-E7A/E80A Housing mounting 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F

Slide Unit Series CX2/CXWM/CXWL

Note 2) 2 magnets for auto switches are equipped to the magnet mounting block. 516 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL Operating Range (mm) Auto switch model Applicable cylinder size 10 16 20 25 32 Housing mounting D-A7/A80 D-A7H/A80H D-A73C/A80C 6 6 6 6 Plate mounting 6 D-E7A/E80A Housing mounting 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F

CP95

6-13-4 Double rod Nonlube Non-rotating Rod Nonlube Single rod Series CP95K 32, 40 50, 63 80, 100 (Standard) (Standard) Double acting 6-13-14 Double rod Nonlube (Standard) (Standard) 6-13-1 2 Profile Design ISO/VDMA Cylinder 32, 40, 50, 63, 80, 100 Series CP95 Space-saving auto switch mounting Space is saved by setting switches completely into grooves provided on 4 surfaces.

CP95

variations Option Heat resistant Stainless steel rod Series Action Type Page Built-in magnet 20Standard Data Nonlube Single rod Series CP95S 32, 40 50, 63 80, 100 Double acting 6-13-4 Double rod Nonlube Non-rotating Rod Nonlube Single rod Series CP95K 32, 40 50, 63 80, 100 (Standard) (Standard) Double acting 6-13-14 Double rod Nonlube (Standard) (Standard) 6-13-1 2 Profile Design ISO/VDMA

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Vacuum

(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

LJ1H

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

MLGP

6 !7 !8 !

MLGP

, 40 32, 40 10 10 32, 40 32, 40 50, 63 32, 40 32, 40 5 10 50 51 100 101 5 10 50 51 100 101 200 200 300 300 Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 80 80 Load weight m (kg) Load weight m (kg) 100 100 80 100 80 10 10 80 6 10 25 26 51 50 100 6 10 25 26 51 50 100 200 200 300 300 Stroke (mm) Stroke (mm) 9-11-16 16 Compact Guide Cylinder with Lock Series MLGP Horizontal

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

2 26 121.7 22 7 12.7 3 27 137.1 23 8 14.3 4 28 154.4 24 9 16.1 5 29 173.9 25 10 18.1 6 30 195.9 26 11 20.4 7 31 220.6 27 12 23.0 8 32 248.5 28 13 25.9 9 33 279.9 29 14 29.2 10 34 315.3 30 15 32.9 11 35 355.1 31 16 37.0 12 36 400.0 32 17 41.7 13 37 446.6 18 47.0 14 38 501.2 52.9 15 39 High 19 Middle 571.5 response response 20 59.6 16 40 642.7 6 13 6.

Compact Type Dual-Rod Cylinder Series CXSJ

Compact Type Dual-Rod Cylinder 15, 20, 25, 32 additionally released. Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

CNA

20+50 2 n=2, 4, 6, 8, Same Different mounting D-B59W Different mounting n=2, 3, 4, 20+35(n-2) n=2, 4, 6, 8, 75+35(n-2) n=2, 4, 6, 8, 80+35(n-2) n=2, 4, 6, 8, 90+35(n-2) D-A44C n=2, 3, 4, 75+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) Same Same side n=2, 3, 4, 55+50(n-2) n=2, 4, 6, 8, 75+50(n-2) n=2, 4, 6, 8, 80+50(n-2) n=2, 4, 6, 8, 90

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

6 M5 type U10/32 type M5 type U10/32 type e !0 i t NBR, Stainless steel !1 !6 w y Gasket M5 type only !7 r Note 1) M5 and U10/32 types are black zinc chromate plated. Note 2) AS231FM type is made of steel. Note 3) Meter-in type is black zinc chromate plated. Note 4) AS131FM(3.2, 4, 6, 1/8", 5/32", 1/4") AS231FM-01(3.2, 4, 6, 1/8", 5/32") is POM.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VFS VS VS7 Dimensions VQ7 Applicable fitting size d 4 Model A L D Flat ribbon cable connector assembly KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 Cable length (L) Assembly part no.

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580