SMC Corporation of America
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Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Note 3) For the D-M9A(V) type auto switch, do not install the switch bracket on the indicator light. (1) BJ-1 is a set of a and b. (2) BM2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Power consumption cost per year Annual air consumption Exhaust time Air consumption ZK2/With energy saving function 957 JPY/year 638 m3/year 0.6 s 58 L/min (ANR) Existing product 14,025 JPY/year 9,350 m3/year 6 s 85 L/min (ANR) Air unit 1.5 JPY/m3 (ANR), Annual operating cycles: 110 (Operating hours: 10 hours/day, Operating days: 250 days/year, 450 cycles/h, when 1 unit is used) Cost conditions

S-type block companion flange L-type block female threaded companion flange S-type block female threaded companion flange Differential pressure indication switch d Differential pressure indication switch S-type block Differential pressure indicator E (Rc) S-type block Differential pressure indication switch Y (75) (50) AE Differential pressure indicator E (Rc) K Differential pressure indicator

.: S-LINK (16 outputs) J1 08 02 8 stations 2 stations Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) J2 Specified layout Note 2) P, E port location (up to 16 solenoids possible) Q R1 R2 V DeviceNet 16 16 stations U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) OMRON Corp.: CompoBus/S (16 outputs) Since J2 and R2 type SI units have

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

90) Operating time (s/90) Operating time (s/90) MHY2-16D MHW2-25D MHF 3.0 20 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 2.5 MHL 15 2.0 MHR 10 1.5 MHK 1.0 5 0.5 MHS 0 0 0.1 0.2 0.4 0.5 0.3 0.2 0.4 0.5 0.3 MHC Operating time (s/90) Operating time (s/90) MHY2-20D MHW2-32D MHT 6 50 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 MHY MHY 40 4 30 MHW MHW 3

Single Stage Compact Regulator for Ultra High Purity Series SL5200 Sub-atmospheric pressure delivery option Springless design (No poppet spring in the wetted area) For UHP gas delivery Flow capacity Standard: to 30 slpm HF (option): to 130 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e SL52 S M FV4 FV4 02

Do not drop, bump or apply excessive impacts (300m/s or more for reed switches and 1000m/s or more for solid state switches) while handling. Although the body of the switch may not be damaged, the inside of the switch could be damaged and cause a malfunction. 2. Do not carry a cylinder by the auto switch lead wires. Never carry a cylinder by its lead wires.

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

W: Weight (kg) F: Load (N) FE: Load equivalent to impact (N) a: Average speed (mm/s) M: Static moment (Nm) : Collision speed (mm/s) L1: Distance to center of load gravity (m) ME: Dynamic moment (Nm) g: Gravitational acceleration (9.8m/s2) 1.4 100 =1.4 a(mm/s) FE= agW (4) 1 3 ME= FEL1=0.05aWL1(Nm) Note 4) Average load ratio (This is for averaging Max. load moment when stopper collides in case

Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

kit 16 stations 16 NKE Corp.: Uni-wire H System 1 to 8 stations SUNX Corp.: S-LINK System (16 output points) 8 SUNX Corp.: S-LINK System (8 output points) 1 to 4 stations 8 stations D side DeviceNet, CompoBus/D (OMRON Corp.) 16 16 stations 1 to 8 stations OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) 8 8 stations 1 to 4 stations Mitsubishi

D 1 F Long stroke model MHKL 2 20 S 1 F F9NL D Number of auto switch Number of fingers S 2 pcs. 1 pc. 2 2 finger Bore size 12 16 20 25 12mm 16mm 20mm 25mm Actuation D S C Double acting Single acting (Normally open) Single acting (Normally closed) Finger material 1 Carbon steel Stainless steel Dust cover material F S Chloroprene rubber Fluoro rubber Silicon rubber Auto switch Without auto

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

W : W max. value is from at Va=300mm/s 1 = W/W max. =10/70 =0.143 L3 C (2) Static moment Examine Mr. (Mp,My values do not apply to this example.)

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Sine Rodless Cylinder Series REA High Speed Cylinder Up To 12in/s Smooth Deceleration Construction Designed To Transport Delicate Workpieces Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products Glass products Allows rapid transport o Major improvement of throughput Rapid transport has been achieved with a maximum drive speed of 300mm/s (12in/s).