5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Switch (when equipped with switch) Internal pilot manifold L: Dimensions n: Stations (n1 + n2) External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 110.5 100 81 15 L n 2 123 112.5 91.5 16 3 123 112.5 91.5 16 4 135.5 125 102 17 5 148 137.5 112.5 18 6 148 137.5 123 12.5 7 160.5 150 133.5 13.5 8 173 162.5 144 14.5 9 185.5 175 154.5 15.5 10 198 187.5 165 16.5 3 135.5 125 102 17 4

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base , Side ported , Available with external pilot , Terminal block box , One-touch fittings, SS5Y3 MANIFOLD BASE, 4/5 PORT SOLENOID VALVE

ISO Cylinder

EE KK (WH) EE G2 4 x FF ND h8 NA NA F FX Width across flats K C 3 AM F FX N2 NA NA H N1 ZZ + Stroke S + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM C EE F FF FX G1 G2 H K KK N1 N2 NA ND S SW (WH) ZZ 20 20 8 G 1/8 30.4 M5 x 0.8 depth 9 22 22 8 30 6 M8 x 1.25 29 15 24 20 0 0.033 76 13 10 106 25 22 10 G 1/8 36.4 M6 x 1 depth 11 26 22 8 36 8 M10 x 1.25 29 15 30 26

SMC Pneumatic Clean Series

Width across flats NA S + Stroke LS + Stroke N2 X Y LT LX LZ ZZ + Stroke (mm) H H2 H1 S P N1 I GB D A 8 13 AL F K MM NA NN B1B2 Bore size 54 47 47 40 B LH LT LS LX LD N2 Z ZZ 6.8 4 LC LZ X Y 31 26 26 26 GA 16 13 13 13 149 GC WA WB WC 34.5 30 24 33.5 28 7 5.5 5.5 5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5

CM2

50 75 100 48 61 73 86 111 136 36 18.2 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2 40 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 46 20.2 Built-in One-touch fitting With rod boot With air cushion (mm) Symbol Bore ZZ Bore WA G N1

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

Table of Contents

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

MHZ

1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 NPT1/8 Symbol Operation manual*1 Calibration certificate*1 Nil Y K T N01 NPT1/8 Piping adapter ZS-46-N2 B Panel mount adapter *1 All texts are in both English and Japanese. Options/Part Nos. ZS-46-B When only optional parts are required, order with the part numbers listed below. Description Part no.

Modular F.R.L. Units

Example) AC30D-F03DE1-SV-16NR-B q w e r t y Nq Body size 20 30 40 Symbol Description Nw Pipe thread type Nil Rc N1 NPT F2 G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size Nil Without auto drain C4 N.C. (Normally closed) Drain port is closed when pressure is not applied. D5 N.O.

MHZ2/MHZJ2

1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

SMC Electronic Switch Series Variations

Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected

Metal Seal/Rubber Seal Series VQ Body Ported

(1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Digital Flow Switch (Integrated display type)

(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Parallel Style Air Gripper Series MHZ

1 N1 1 N1 MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHZ2-25 MHZ2-25 1 N1 MHZ2-32 2 MHZ2-32 1 MHZ2-40 2 MHZ2-40 1 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

High-Precision Digital Pressure Switch

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20