Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

Table of Contents

K Y A J K B Y C D Misc.

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Symbol A23 -j -j Symbok A21 Symbok A20 Symbol' A22 Symbol, A24 30' I Q " m "~ M , I 30' ~i m " o 0 " '-/! T T A A L : AL : A H , H H H Symbot, A26 Symbok A25 Symbol' A27 ~!'~~~ _ '_ 7) M A =~O=D=A=3 ~!

AC

, 3/8, 1/2, 3/4 Easy maintenance.

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Electric Actuators

3 0.5 3 3 3 N.O.

2/3 Port Valve

2 3 4 2 3 4 2 3 4 2 3 4 1 2 3 Option (Bracket) Grommet: G Conduit: C Min. pitch for bracket is H mm.

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

NCA1

D across flats C BA NCM KK NCA EA MM B DR E -X AA 20G J TF F UF LF + Stroke WF Data XF + Stroke A ZF + Stroke MM KK E A AA B BA C D EA EE F FB G J R TF UF WF Y P XF ZF Bore size (in) 150 (1.5") 2 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 1 1.71 2.36 4 5/8 5 200 (2") 5/8 2 1/2 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3

NCA1

KK CD B MM A C FA G WF J F L M 4-DD CW CB E CW LF + Stroke XD + Stroke ZD + Stroke Bore size (in) MM KK A AA B C CB CD CW D DD E EA EE F FA G J L LR M WF XD Y LF P ZD 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 3/4 5/8 1/2 1 3/8 6 1/8 2.09 3 5/8 2.40 6 5/8 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1/2 3/4 1/2 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30

2 Phase Stepper Motor/Without Motor Brake Series LXS

3 0.5 3 3 3 N.O.

PSxx-OMR0001CN

5 2 () -28No.PS-OMR0001CN-J 3 DIN DIN DIN DIN (1)1DIN (2)2 1 2 (1)DIN (2)OUT() -29No.PS-OMR0001CN-J 3 () 0.45 Nm10 M52 1.6 mm (20 ) -30No.PS-OMR0001CN-J 3 () 2 n (12 ) (1n ) -31No.PS-OMR0001CN-J 3 () M5() 3.5 mm (22) M5()2 1.6 mm (22) -32No.PS-OMR0001CN-J 3 / ISA3 ,ISA3 (ISA-15) 2 4 6 (0.75 Nm10) -33No.PS-OMR0001CN-J 3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 -34No.PS-OMR0001CN-J

LX

3 0.5 3 3 3 N.O.

NCA1

F FB G J R TF UF W WF Y LF P ZB 150 (1.5) 5/8 7/16-20 3/4 2.02 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 5/16 1.26 1.1 1.43 2 3/4 3 3/8 5/8 1 1.71 3 5/8 2.36 4 5/8 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 5/8 1 1.71 3 5/8 2.4 4 5/8 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 9/16 5/16-24 3 0 3/8 3/8 3/8 1.3 1.06 2.19 3 7/8

High Vacuum Angle Valve

100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

ZP

Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80

TABLE OF CONTENTS

3/8 NPT 1 10 1/2 NPT 33 12 11 1 NPT 23 13 1 1/2 NPT 24 14 3/4 NPT 29 19 2 NPT 26 16 2 1/2 NPT 27 17 3 NPT 28 18 B Mounting Bracket In an AC appl. give full details 2 Series 20 3 Series 30 4 Series 40 5 Series 50 7 Series 70 8 Series 80 1 2WNO 2 2WNC 3 3WNC 4 3WNO 5 3WDC 6 3WMP 18 Direct Lift 2WNO 27 Direct Lift 2WNC 28 Pilot Lift 2WNC G 1/32 H 3/64 J 1/16 K 3/32 L 7/64 N 1/8 O 5/32 P 3/16

JXCx-OMU0004

P.50 34 No.JXC-OMU0004-A 7.3 SW (A) (B) PLC PLC SW (C) A,B,C A B C I/O I/O I/O 35 No.JXC-OMU0004-A A e i j PLC h 15 8.1 P.40 8.4 P.43 36 No.JXC-OMU0004-A B PLC I/O PLC PLC PLC PLC 3 i j 3 PLC PLC PLC PLC I/O g 7 LED f L L (1) 7 LED f (2) (3) 3 k n c 37 No.JXC-OMU0004-A C h [15] g 2 i j i h j g i 2 j i i h [0] j j 3 g 3 i OFF j 3 2 e h 0 h i g 3 j

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

MXS

Series MXS Dimensions MXS 6 2-M2.5 X 0.45 thread 3 deep Operating port 2-M3 X 0.5 6 3 2 J I 5 Max. 10.5 (With stroke adjuster at retraction end) Basic style 5.5 3 5.5 5.5 3 6.5 2-M2.5 X 0.45 thread 3 deep 12.5 K Stroke adjuster at extension end Stroke adjuster at retraction end (With stroke adjuster at extension end) 18 N-M3 X 0.5 thread 4 deep 5.5 3 4-M2.5 X 0.45 thread 3.5 deep 4 0.5 (With